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1. Nitrogen Ion Beam Irradiation Effects on Photocatalytic Property of Titanium Oxide Thin Films Prepared by Ion Beam Assisted Deposition Method

Author

Ichiro Takano, Michiko Sasaki, Isao Nakamura, and Yoshio Sawada

Subjects
Materials science, Inorganic chemistry, chemistry.chemical_element, Condensed Matter Physics, Focused ion beam, Nitrogen, Surfaces, Coatings and Films, Titanium oxide, Ion beam irradiation, Ion beam deposition, chemistry, Photocatalysis, Electrical and Electronic Engineering, Thin film, Ion beam-assisted deposition
Published
2003

2. Influence of Constitution for the Optical Properties of TiO2-TiN Compound Films

Author

Kazunori Takayama, Yoshio Sawada, and Ichiro Takano

Subjects
Materials science, Infrared, business.industry, chemistry.chemical_element, Condensed Matter Physics, medicine.disease_cause, Surfaces, Coatings and Films, chemistry, Sputtering, medicine, Transmittance, Optoelectronics, Electrical and Electronic Engineering, Tin, business, Optical filter, Ultraviolet
Abstract

It is well known that TiO2 film and TiN film as an optical filter have the characteristics cutting an ultraviolet ray and an infrared ray, respectively. These filters begin to be used as a window glass for cars or buildings, because a harmful ultraviolet ray for the human body or an infrared ray leading to increase of a temperature in buildings can be avoided by these filters.In this study, three kinds of films based on TiO2 and TiN were prepared by a reactive sputtering method. These films are a mixed film (Ti-O-N), multilayer films (TiN/TiO2 and TiO2/TiN) and graded films (TiN-TiO2 and TiO2 TiN). The optical properties about an ultraviolet ray, visible ray and infrared ray were measured by a spectroscope.A cut off rate of the multilayer film exhibited the highest value in an ultraviolet ray and an infrared ray. However transmittance of a visible ray decreased by influence of a boundary between TiO2 and TiN film. Therefore a visible ray transmittance of the graded film without a boundary rose in comparison with that of the multilayer film.

Published
2003

3. Dependence on Various Vacuum Pressures and Gas Atmospheres for Tribological Property of Ti-Based Thin Films

Author

Ichiro Takano, Yoshio Sawada, Michiko Sasaki, and Isao Nakamura

Subjects
Materials science, Ion beam, Scanning electron microscope, Metallurgy, chemistry.chemical_element, Substrate (electronics), Tribology, Condensed Matter Physics, Surfaces, Coatings and Films, law.invention, Optical microscope, chemistry, law, Electrical and Electronic Engineering, Thin film, Ion beam-assisted deposition, Tin
Abstract

Tribological properties of Ti-based (Ti, TiO2 and TiN) films on the stainless steel (304SS) substrate were investigated in the atmosphere of N2, O2 and air at several pressures. Films 0.2 μm thick were prepared on the mirror-polished substrate with an ion beam assisted deposition method, an ion beam assisted reactive deposition method and the dynamic ion mixing method. Tribological tests were carried out with a friction tester of Pin-On-Disk type in a high vacuum equipment. The wear surface was observed with an optical microscope, a scanning laser microscope and a scanning electron microscope.The friction coefficients of stainless steel, Ti, TiO2 and TiN film increased with decreasing a pressure and those except of stainless steel converged on 0.3 in a pressure of 1 × 10-3 Pa. In an O2 atmosphere, the behavior of the Ti film in a friction coefficient for a pressure was similar to that of the TiO2 film, and in a N2 atmosphere, the friction coefficients of Ti and TiN film showed the same value. These results suggested the relation between a kind of a gas atmosphere in the tribological test and the film element.

Published
2002

4. Influence on Photocatalytic Properties by Doping of Chromium to Titanium Oxide Thin Films using Ion Beam Assisted Deposition Method

Author

Ichiro Takano, Isao Nakamura, and Yoshio Sawada

Subjects
Materials science, Inorganic chemistry, Condensed Matter Physics, Photochemistry, Evaporation (deposition), Surfaces, Coatings and Films, Amorphous solid, Titanium oxide, Photocatalysis, Irradiation, Electrical and Electronic Engineering, Thin film, Ion beam-assisted deposition, Layer (electronics)
Abstract

The photocatalytic properties of Cr-doped TiO2 films was investigated by the immersion test in a methylene blue solution under UV light irradiation. The Cr/TiO2 films were prepared as follows; after TiO2 film was prepared on a slide glass substrate by He+-ion beam assisted reactive deposition method (He+-IBARD), Cr was doped into TiO2 films by Ar+-ion beam assisted deposition method (Ar+-IBAD).In the Ar+-IBAD method, Ar+ ion irradiation was carried out during Cr evaporation in order to form the mixing layer of Cr and TiO2. Ar+ ions played an important role to knock on Cr atoms into TiO2 film. The rate of absorbance change for blank of Cr/TiO2 film showed higher value than that of TiO2 film under UV light irradiation. In order to improve photocatalytic properties of Cr-doped TiO2 films, it was required that doped-Cr showed the metal state and amorphous structure.

Published
2002

6. [Untitled]

Author

Masahito TAGAWA, Hitoshi AKIMICHI, Chiharu MAEDA, Masahiro HIRATA, Shin-ichi NISHIZAWA, Seiji HIROKI, Sadamitsu TANZAWA, Takashi ARAI, Tetsuya ABE, Katsusuke SHIMIZU, Jyun-nosuke NAKATANI, Shizuma KURIBAYASHI, Megumi NAKAMURA, Toru SASAKI, Yoshiro SHIOKAWA, Nozomu HATTORI, Takafumi MORII, Masaaki HIRAI, Masahiko KUSAKA, Motohiro IWAMI, Zhao-Xiong XIE, Kayo IWASE, Ken-ichi TANAKA, Toshimi SUTOU, Tomohiro UMEZAWA, Daisuke ESASHIKA, Shigeru SAITO, Tetsuo SOUMURA, Shuji ISONO, Hideki YAMASAKI, Hakuto MURAKAMI, Masahiko YAMAMOTO, Takuji OYAMA, Takashi IKUNO, Jeong-Tak Ryu, Shigeharu OHKURA, Yang-Gyu Baek, Shin-ichi HONDA, Mitsuhiro KATAYAMA, Masahiko KITAGAWA, Kenjiro OURA, Keiichi FUJIMOTO, Kuei-Yi LEE, Nobuhiko OTA, Shinji SHINABE, Yuto FUKUMA, Yusuke SUETSUGU, Yao-Jane HSU, Yasunori TANIMOTO, Youichirou HORI, Ken-ichi KANAZAWA, Masanori KOBAYASHI, Masahide GOTOH, Koichi SUDOH, Hiroshi IWASAKI, Keisuke KAMETANI, Touichi HATANO, Masato KIUCHI, Katsutoshi TANAKA, Seiji TAKECHI, Satoshi SUGIMOTO, Seiichi GOTO, Tsukasa KOBAYASHI, Ryoki TOBE, Teruo YANAGIHASHI, Tetsuro OBAYASHI, Shigemi SUGINUMA, Tetsuo OGAWA, Kiyohide KOKUBUN, Takashi SEKIDO, Ichiro TAKANO, Yoshio SAWADA, Yoshiaki SAKURAI, Akio OKAMOTO, Toshikazu NOSAKA, Hiroya NAKAJIMA, Hiroshi KODA, Masaaki YOSHITAKE, Toyohito UCHIZONO, Toshiaki YASUI, Hirokazu TAHARA, Takao YOSHIKAWA, Akio SUZUKI, Jun SAKAMOTO, Takeshi MITSUHASHI, Akihito MORI, Takanori AOKI, Tatsuhiko MATSUSHITA, Masahiro OKUDA, Hiroyuki NAKANO, Hideo FURUHASHI, Toshio YOSHIKAWA, Akinori MAEDA, Yoshiyuki UCHIDA, Kenzo KOJIMA, Asao OHASHI, Shizuyasu OCHIAI, Teruyoshi MIZUTANI, Yasuharu YAMASHITA, Shu KUROKAWA, Akira SAKAI, Tomohide SASAKI, Tetsuro SHIRAO, Nobuhiro KANEKO, Keniche SHUDO, Masatoshi TANAKA, Kaoru OJIMA, Masamichi YOSHIMURA, Kazuyuki UEDA, Joselito LABIS, Akihiko OHI, Toshinori FUJIKI, Tadao TODA, Hiroshi HARIMA, Nobumasa KIWA, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA, Yoichiro YGI, Kiminori KAKITANI, Hiroko KAJI, Akio YOSHIMORI, Kazuhiko HASEGAWA, Wilson A. Dino, Hideaki KASAI, Ayao OKIJI, Katsuhisa CHIDA, Tetsumi TANABE, Yoshitsugu ARAKAKI, Morio YOSHIZAWA, Kouji NODA, Katsuhiro NAKAMURA, Yasushi YAMANO, Shinichi KOBAYASHI, Yoshio SAITO, Yoshihiro SATOH, Tomio KUBO, Hideharu MATSUSHIMA, Ken KASUGA, Hiroki ASARI, Norihiko IMAIZUMI, Kentarou SEKIKAWA, Masahiro SHIBUSAWA, Keisuke TAJIRI, Zenzaburo KABEYA, Yoshikazu NAKAYAMA, Shin AKIDUKI, Kazuhiro HASHIMOTO, Masamitu TAKAHASI, Jun'ichiro MIZUKI, Kazuhisa TAMURA, Toshihiro KONDO, Kohei UOSAKI, Shigeharu TAMURA, Masato YASUMOTO, Nagao KAMIJO, Yoshio SUZUKI, Mitsuhiro AWAJI, Akihisa TAKEUCHI, Hidekazu TAKANO, Hiroshi ITOH, Hidehiko NONAKA, Shingo ICHIMURA, Masahiro TOSA, Kazutaka MITSUISHI, Masaki TAKEGUCHI, Yoshio FUKUDA, Masahiro GOTO, Akira KASAHARA, Kazuo FURUYA, Kazuhiro YOSHIHARA, Kazuhiko MIMOTO, Takashi MATSUMOTO, Kunio OKIMURA, Kimiko SATO, Tsutomu TAKAHASHI, Tadashi NAKAMURA, Naohiro HORII, Akihiro INOUE, Nobuharu OHSAKO, Takeshi MIYASHITA, Kengo HIDAKA, Atsushi TANAKA, Hisahiro TANGE, Yuji TANAKA, Katsumi NISHIMURA, Takashi KOJIMA, Nozomu TAKAGI, Tatsuo WAKAIDA, Takeo HOSAKA, Akira SAKAZAKI, Takahiro OKADA, Akihiro TANAKA, Yasunori Yamamura, Yoshiyuki MIZUNO, Teiichi HOMMA, Sin'ichi INOUE, Yuhjin YAMAZAKI, Toshiaki FUJINO, Tomohisa OKUNO, Ken-ichi OHTOMI, Ken'ichi MIURA, Itsuo ISHIGAMI, Hideaki HOSHINO, Tomoyuki MIZUKOSHI, Fumihiro URATANI, Hiroshi NAKANISHI, Won-chul Moon, Tatsuo YOSHINOBU, Osamu SUEKANE, Masakazu TANAKA, Toshiko OKUI, Katsuhito ARAKAWA, Shigehiko HASEGAWA, Hisao NAKASHIMA, Miwako KUBO, Hiroshi MORIKAWA, Shizuo FUJITA, Shigeo FUJITA, Toshinari YAMAZAKI, Toshio YOSHIZAWA, Toshio KIKUTA, Shigeki HIROBAYASHI, Noriyuki NAKATANI, Tatsuo YAMABUCHI, Masatomo NISHIURA, Toru KANAJI, Makoto TANAKA, and Z. An

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
2001

8. Formation of Diamond-like Carbon Thin Films by Ion Beam Assisted Deposition Method

Author

Tomohumi Kasiwagi, Yohio Sawada, Ichiro Takano, Masaru Takashika, Isao Nakamura, and Michiko Sasaki

Subjects
Materials science, Ion beam, Diamond-like carbon, Analytical chemistry, Condensed Matter Physics, Surfaces, Coatings and Films, Amorphous solid, Condensed Matter::Materials Science, Carbon film, Ion beam deposition, Physics::Plasma Physics, Condensed Matter::Superconductivity, Knoop hardness test, Electrical and Electronic Engineering, Thin film, Ion beam-assisted deposition
Abstract

The mechanical properties of diamond-like carbon (DLC) thin films on SUS304 substrate have been studied. DLC thin films were prepared by the ion beam assisted deposition method. In this method, He+ ion irradiation was carried out in a C2H4 gas atmosphere. He+ ions were accelerated at an energy of 15 keV, and the ion beam current densities were changed from 10 to 100 μA/cm2. Atomic concentration and structure of the films were investigated by X-ray photoelectron spectroscopy and Raman spectroscopy. The mechanical properties of hardness and friction coefficient were determined using the Knoop hardness tester and the pin-on-disk tribometer.The DLC thin films had amorphous structure that composed chiefly of graphite and disorder of graphite states. The Knoop hardness of the films increased with increasing He+ ion current density, and the film prepared at a current density of 80 μA/cm2 showed the maximum Knoop hardness value of 890 kgf/cm2. The friction coefficient of the film prepared at a current density of 60 μA/cm2 indicated lower value than that of the other current densities. From these results, it was cleared that the mechanical properties and structure of DLC thin films were greatly affected by the He+ ion beam current density.

Published
2005

9. [Untitled]

Author

Kunio Okimura, Tomohiro Umezawa, Kentarou Sekikawa, Hitoshi Akimichi, Chiharu Maeda, Shigehiko Hasegawa, Asao Ohashi, Megumi Nakamura, Yao-Jane Hsu, Seiji Takechi, Tetsuro Shirao, Keiichi Fujimoto, Atsushi Tanaka, Tetsuya Abe, Tomohisa Okuno, Mitsuhiro Katayama, Satoshi Sugimoto, Shizuma Kuribayashi, Toshimi Sutou, Teiichi Homma, Masaki Takeguchi, Hisahiro Tange, Akinori Maeda, Zhao-Xiong Xie, Ken'ichi Miura, Jyun-Nosuke Nakatani, Yasushi Yamano, Masahiro Tosa, Jun'ichiro Mizuki, Hiroko Kaji, Masaaki Yoshitake, Shigeharu Ohkura, Hiroki Asari, Z. An, Akihiro Inoue, Shin-Ichi Nishizawa, Toru Sasaki, Akira Kasahara, Tetsuo Soumura, Akio Yoshimori, Nobuhiro Kaneko, Yoshio Sawada, Hideki Yamasaki, Yoshiro Shiokawa, Hiroshi Itoh, Junzo Ishikawa, Masamichi Yoshimura, Kazuhiko Mimoto, Tsutomu Takahashi, Tatsuhiko Matsushita, Kazuyuki Ueda, Takuji Oyama, Toshihiro Kondo, Tadao Toda, Yoshikazu Nakayama, Morio Yoshizawa, Kiyohide Kokubun, Ichiro Takano, Nozomu Takagi, Akira Sakai, Masahiro Shibusawa, Masatomo Nishiura, Takao Yoshikawa, Shizuyasu Ochiai, Nobuhiko Ota, Hideharu Matsushima, Masaaki Hirai, Masakazu Tanaka, Masahiko Kusaka, Akira Sakazaki, Tomoyuki Mizukoshi, Toshikazu Nosaka, Tomio Kubo, Shigeru Saito, Shuji Isono, Yuhjin Yamazaki, Sadamitsu Tanzawa, Hiroshi Iwasaki, Kazuhiro Yoshihara, Kimiko Sato, Toshinori Fujiki, Masahiro Goto, Osamu Suekane, Yasunori Yamamura, Takashi Arai, Tsukasa Kobayashi, Shigemi Suginuma, Joselito Labis, Kazuhiko Hasegawa, Jun Sakamoto, Shin-Ichi Honda, Yasuharu Yamashita, Takashi Sekido, Shu Kurokawa, Kaoru Ojima, Naohiro Horii, Keniche Shudo, Teruyoshi Mizutani, Tatsuo Yamabuchi, Masanori Kobayashi, Wilson Agerico Diño, Keisuke Tajiri, Hiroshi Koda, Masahiko Kitagawa, Kiminori Kakitani, Akihito Mori, Yusuke Suetsugu, Hirokazu Tahara, Masahito Tagawa, Takashi Matsumoto, Katsuhito Arakawa, Hiroshi Harima, Ryoki Tobe, Noriyuki Nakatani, Ken Kasuga, Kengo Hidaka, Yuto Fukuma, Fumihiro Uratani, Katsusuke Shimizu, Yoshitsugu Arakaki, Takeshi Miyashita, Seiji Hiroki, Tetsuo Ogawa, Kazuhisa Tamura, Kuei-Yi Lee, Akihiro Tanaka, Shinichi Kobayashi, Takanori Aoki, Masatoshi Tanaka, Tadashi Nakamura, Ken-Ichi Ohtomi, Akihiko Ohi, Yuji Tanaka, Takeshi Mitsuhashi, Nozomu Hattori, Teruo Yanagihashi, Sin'ichi Inoue, Koichi Sudoh, Shin Akiduki, Masato Kiuchi, Katsuhisa Chida, Toshiko Okui, Yoshio Fukuda, Jeong-Tak Ryu, Makoto Tanaka, Masahiro Hirata, Ayao Okiji, Miwako Kubo, Tomohide Sasaki, Daisuke Esashika, Tatsuo Yoshinobu, Akihisa Takeuchi, Norihiko Imaizumi, Tetsumi Tanabe, Masato Yasumoto, Hidekazu Takano, Kazuo Furuya, Kenzo Kojima, Toru Kanaji, Yoshiaki Sakurai, Touichi Hatano, Takahiro Okada, Takashi Kojima, Keisuke Kametani, Hiroshi Nakanishi, Toshio Kikuta, Shingo Ichimura, Kohei Uosaki, Itsuo Ishigami, Motohiro Iwami, Takeo Hosaka, Hidehiko Nonaka, Shigeo Fujita, Hiroyuki Nakano, Toshiaki Fujino, Kayo Iwase, Yasunori Tanimoto, Ken-ichi Kanazawa, Toyohito Uchizono, Yang-Gyu Baek, Shizuo Fujita, Yoshio Saito, Shigeharu Tamura, Shinji Shinabe, Yoichiro Ygi, Katsuhiro Nakamura, Nobumasa Kiwa, Mitsuhiro Awaji, Takashi Ikuno, Hakuto Murakami, Youichirou Hori, Toshiaki Yasui, Toshinari Yamazaki, Tetsuro Obayashi, Kazutaka Mitsuishi, Akio Okamoto, Hideaki Kasai, Takafumi Morii, Masamitu Takahasi, Yasuhito Gotoh, Hideo Furuhashi, Ken-Ichi Tanaka, Hiroya Nakajima, Masahiko Yamamoto, Hiroshi Morikawa, Hiroshi Tsuji, Zenzaburo Kabeya, Katsutoshi Tanaka, Kenjiro Oura, Katsumi Nishimura, Masahiro Okuda, Won-Chul Moon, Tatsuo Wakaida, Toshio Yoshikawa, Hisao Nakashima, Hideaki Hoshino, Nagao Kamijo, Shigeki Hirobayashi, Kouji Noda, Akio Suzuki, Yoshio Suzuki, Masahide Gotoh, Yoshihiro Satoh, Yoshiyuki Mizuno, Kazuhiro Hashimoto, Yoshiyuki Uchida, Seiichi Goto, Nobuharu Ohsako, and Toshio Yoshizawa

Subjects
Electrical and Electronic Engineering, Condensed Matter Physics, Surfaces, Coatings and Films
Published
1995

10. Formation of Ti-Al-N Thin Films by the Dynamic Ion Mixing Method

Author

Shoji Isobe, Hiroyuki Yoshida, Ichiro Takano, and Masato Sasase

Subjects
Imagination, Thesaurus (information retrieval), Materials science, Chemical substance, Ion beam mixing, media_common.quotation_subject, Ion mixing, Condensed Matter Physics, Surfaces, Coatings and Films, Search engine, Chemical engineering, Electrical and Electronic Engineering, Thin film, Science, technology and society, media_common
Published
1995

13. Titanium Oxide Thin Films Prepared by the Ion Beam Mixing Method

Author

Shoji Isobe, Ichiro Takano, and Masato Sasase

Subjects
Materials science, Ion beam mixing, Chemical engineering, Electrical and Electronic Engineering, Thin film, Condensed Matter Physics, Surfaces, Coatings and Films, Titanium oxide
Published
1992

14. Preparation of Metal Nitrides Using Low-Energy Ion Beams

Author

Shoji Isobe and Ichiro Takano

Subjects
Imagination, Thesaurus (information retrieval), Chemical substance, Materials science, media_common.quotation_subject, Inorganic chemistry, Nanotechnology, Nitride, Condensed Matter Physics, Surfaces, Coatings and Films, Ion, Metal, Search engine, visual_art, visual_art.visual_art_medium, Electrical and Electronic Engineering, Science, technology and society, media_common
Published
1991

15. Formation of TiN/Ti Gradient Films by The Dynamic Ion Mixing Method

Author

Shoji Isobe, Hiroyuki Yoshida, and Ichiro Takano

Subjects
Materials science, chemistry, Ion mixing, Analytical chemistry, chemistry.chemical_element, Electrical and Electronic Engineering, Condensed Matter Physics, Tin, Surfaces, Coatings and Films
Published
1995

16. TiN coating formed by large current ion implantation machine

Author

Masakatsu Takemoto, Kiichi Hojou, Ichiro Takano, and Shoji Isobe

Subjects
Materials science, Ion beam mixing, Ion beam, Scanning electron microscope, Analytical chemistry, chemistry.chemical_element, Ion current, engineering.material, Condensed Matter Physics, Surfaces, Coatings and Films, Ion implantation, Coating, chemistry, engineering, Electrical and Electronic Engineering, Tin, Titanium
Abstract

Hardness and wear resistance properties of TiN coating films formed by a newly-designed, large current ion implantation machine were studied. The ion beam of this machine has current and a diameter larger than conventional implantation machines in order to improve surface layer properties of metals and others. This machine provides the maximum ion current of 0.2 A (continuously) at 40 kV or 0.4 A at 20 kV.Compared with other samples, implantation doses of 6×1017 N+ /cm2 into titanium deposited films of 0.3 micrometer thickness on SUS304 plate give the best friction coefficient within 6 meter long dry sliding length under heavily weighted condition. Optimum relation between ion doses and thicknesses of titanium layer was found. The coated surfaces of the samples were observed by a scanning electron microscopy and were analyzed by an electron spectroscopy for chemical analysis (ESCA).

Published
1986

18. Secondary ion mass spectroscopy of TiN thin films obtained by ion beam mixing

Author

Shoji Isobe, Masahiro Ishida, Tomo Baba, Masakatsu Takemoto, and Ichiro Takano

Subjects
Secondary ion mass spectrometry, Secondary Ion Mass Spectroscopy, Ion beam deposition, Tin thin films, Ion beam mixing, Chemistry, Inorganic chemistry, Analytical chemistry, Electrical and Electronic Engineering, Condensed Matter Physics, Focused ion beam, Surfaces, Coatings and Films
Published
1987

19. Chemical impedance of TiN thin films obtained by ion beam mixing

Author

Ichiro Takano, Shoji Isobe, Masakatsu Takemoto, Masahiro Ishida, and Tomo Baba

Subjects
Ion beam deposition, Materials science, Tin thin films, Ion beam mixing, Analytical chemistry, Electrical and Electronic Engineering, Condensed Matter Physics, Electrical impedance, Surfaces, Coatings and Films
Published
1987

20. Characteristics of ion beam extraction from large current ion implantation machine

Author

Shoji Isobe, Ichiro Takano, and Masakatsu Takemoto

Subjects
Materials science, Ion beam, business.industry, Condensed Matter Physics, Focused ion beam, Charged particle, Surfaces, Coatings and Films, Ion, Ion beam deposition, Ion implantation, Hardening (metallurgy), Optoelectronics, Electrical and Electronic Engineering, business, Radiation hardening
Published
1986

21. Characteristics of TiN thin films produced by dynamic mixing

Author

Tomo Baba, Masahiro Ishida, Shoji Isobe, Masakatsu Takemoto, and Ichiro Takano

Subjects
Materials science, Tin thin films, Electrical and Electronic Engineering, Composite material, Condensed Matter Physics, Mixing (physics), Surfaces, Coatings and Films
Abstract

イオンビームミキシング装置を用い, ダイナミックミキシング及びスタティックミキシングにより, SUS304の表面にTiN薄膜を生成した結果, 硬さ及び耐摩耗特性は向上することがわかった.特に, ダイナミックミキシングによって硬さは母材の約7倍にもなった.またダイナミックミキシソグにより, SUS304の表面に均一なTiN膜が生成でき, 短時間の処理によってその表面改質ができることがわかった.今後は, 蒸着速度やイオンの加速電圧, 注入量等を変化させ, さらに試料母材やイオンの種類を変えて他の方法との比較をする予定である.

Published
1987

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