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Abstract: We have developed a novel flexible pH sensor based on a polymeric substrate by low-cost sol–gel fabrication process of iridium oxide (IrO x ) sensing film. A pair of miniature IrO x /AgCl electrodes on a flexible substrate generated electrical potentials in solutions by electrochemical mechanisms responding to their pH levels. Our flexible IrO x pH sensors exhibited promising sensing performance with a near-Nernstian response in sensitivity repeatedly and reversibly between −51.1mV/pH and −51.7mV/pH in the pH range between 1.5 and 12 at 25°C. The fabrication processes including sol–gel deposition, thermal oxidation, and AgCl electro-plating on polymeric substrates were reported. The performance and characterization of the flexible pH sensors in sensitivity, response time, stability, reversibility, repeatability and selectivity were also discussed. Our IrO x pH electrodes on a deformable substrate demonstrated their sensing capability while they were conformed to a curved surface inside a limited space with distinct responding potentials at various pH levels similar to the traditional glass-rod pH electrodes. [Copyright &y& Elsevier]

Abstract: Distributed MEMS phase shifters using CMOS-grade low-resistivity silicon have been successfully developed. Kapton films were utilized as dielectric layers to reduce RF signal attenuation in the lossy silicon substrate. The scattering parameters were evaluated from DC to 26GHz. The phase shifting reaches 43° and insertion losses are less than 1.4dB. The manufacturing process is simple and compatible with CMOS and post CMOS processes. [Copyright &y& Elsevier]