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1. Carbon Nanotube Integration with a CMOS Process

Author

Maximiliano S. Perez, Betiana Lerner, Daniel E. Resasco, Pablo D. Pareja Obregon, Pedro M. Julian, Pablo S. Mandolesi, Fabian A. Buffa, Alfredo Boselli, and Alberto Lamagna

Subjects
carbon nanotube sensor, CMOS integration, microchip sensor, SWCNT, Chemical technology, TP1-1185
Abstract

This work shows the integration of a sensor based on carbon nanotubes using CMOS technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS process, leaving a free window on the passivation layer that allowed the deposition of SWCNTs over the electrodes. We successfully investigated with the CS the effect of humidity and temperature on the electrical transport properties of SWCNTs. The possibility of a large scale integration of SWCNTs with CMOS process opens a new route in the design of more efficient, low cost sensors with high reproducibility in their manufacture.

Published
2010
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2. Carbon Nanotube Integration with a CMOS Process

Author

Fabián Alejandro Buffa, Alfredo Boselli, Pablo D. Pareja Obregon, Daniel E. Resasco, Pedro Julian, Pablo S. Mandolesi, Alberto Lamagna, Betiana Lerner, and Maximiliano S. Pérez

Subjects
Engineering, Passivation, CMOS integration, Nanotechnology, Carbon nanotube, Hardware_PERFORMANCEANDRELIABILITY, lcsh:Chemical technology, Biochemistry, Article, Analytical Chemistry, law.invention, law, SWCNT, carbon nanotube sensor, Hardware_INTEGRATEDCIRCUITS, Deposition (phase transition), lcsh:TP1-1185, Electrical and Electronic Engineering, Instrumentation, PACS 85.35.-p, business.industry, microchip sensor, Chip, 85.40.-e, 85.35.Kt, Atomic and Molecular Physics, and Optics, CMOS, Electrode, Cmos process, business, Layer (electronics)
Abstract

This work shows the integration of a sensor based on carbon nanotubes using CMOS technology. A chip sensor (CS) was designed and manufactured using a 0.30 μm CMOS process, leaving a free window on the passivation layer that allowed the deposition of SWCNTs over the electrodes. We successfully investigated with the CS the effect of humidity and temperature on the electrical transport properties of SWCNTs. The possibility of a large scale integration of SWCNTs with CMOS process opens a new route in the design of more efficient, low cost sensors with high reproducibility in their manufacture.

Published
2010

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