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Start Over Author "Baıdakova, M. V." Journal semiconductors
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1. Growth of Diamond Films on Crystalline Silicon by Hot-Filament Chemical Vapor Deposition.

Author

Baıdakova, M. V., Vul’, A. Ya., Golubev, V. G., Grudinkin, S. A., Melekhin, V. G., Feoktistov, N. A., and Krüger, A.

Subjects
*DIAMOND thin films, *CHEMICAL vapor deposition
Abstract

The effect of hot-filament chemical vapor deposition conditions on the phase composition of diamond films grown on a silicon substrate was studied. The growth conditions providing the highest content of diamond phase at a growth rate of about 1 µm/h were ascertained. [ABSTRACT FROM AUTHOR]

Published
2002
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