1. Composition and optical properties of amorphous a-SiO:H films with silicon nanoclusters.
- Author
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Terekhov, V., Terukov, E., Undalov, Yu., Parinova, E., Spirin, D., Seredin, P., Minakov, D., and Domashevskaya, E.
- Subjects
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AMORPHOUS semiconductors , *SILICON oxide films , *PHOTOLUMINESCENCE , *LIGHT absorption , *ULTRASOFT X-ray spectroscopy - Abstract
The phase composition and optical properties of hydrogenated amorphous films of silicon suboxide ( a-SiO:H) with silicon nanoclusters are studied. Ultrasoft X-ray emission spectroscopy show that silicon- suboxide films with various oxidation states and various amorphous silicon-cluster contents can be grown using dc discharge modulation. In films with an ncl-Si content of ∼50%, the optical-absorption edge is observed, whose extrapolation yields an optical band gap estimate of ∼3.2-3.3 eV. In the visible region, rather intense photoluminescence bands are observed, whose peak positions indicate the formation of silicon nanoclusters 2.5-4.7 nm in size in these films, depending on the film composition. [ABSTRACT FROM AUTHOR]
- Published
- 2016
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