1. Thermal-Wave Imaging
- Author
-
Allan Rosencwaig
- Subjects
Multidisciplinary ,Microscope ,Materials science ,business.industry ,Engineering physics ,law.invention ,Optics ,law ,Thermal ,Microelectronics ,Thermal wave ,business ,Spectroscopy ,Excitation - Abstract
Thermal features on and beneath the surface of a sample can be detected and imaged with a thermal-wave microscope. Various methodologies for the excitation and detection of thermal waves are discussed, and several applications, primarily in microelectronics, are presented.
- Published
- 1982
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