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Thermal-Wave Imaging
- Source :
- Science. 218:223-228
- Publication Year :
- 1982
- Publisher :
- American Association for the Advancement of Science (AAAS), 1982.
-
Abstract
- Thermal features on and beneath the surface of a sample can be detected and imaged with a thermal-wave microscope. Various methodologies for the excitation and detection of thermal waves are discussed, and several applications, primarily in microelectronics, are presented.
Details
- ISSN :
- 10959203 and 00368075
- Volume :
- 218
- Database :
- OpenAIRE
- Journal :
- Science
- Accession number :
- edsair.doi.dedup.....0809af5197cf364d87fc65d55be14115
- Full Text :
- https://doi.org/10.1126/science.218.4569.223