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The head and wake waves of filtration combustion of calcium hydride in a flow of a mixture of silicon tetrafluoride and hydrogen at silicon tetrafluoride weight fractions of 0.8, 0.85, 0.9, and 0.98 were studied. The spatial profiles of the combustion waves were constructed. With their aid, the thermal structure of the head and wake waves was found, and the width of each zone in the combustion wave for different compositions of the gas phase was determined. With increasing concentration of the reagent gas in the flow, the reaction zone width increases in the head wave and decreases in the wake wave. The structure of the head wave corresponds to the intermediate combustion wave, and the structure of the wake wave, to the normal combustion wave.

The dependence has been investigated of the maximum temperature in the reaction front, the linear velocity of the combustion wave of CaH2 in a mixture of gases SiF4 and H2 with the formation of SiH4, and the conversion of calcium hydride on the initial mass concentration of silicon tetrafluoride. The experimental data have been obtained in a vertical flow reactor with forced gas filtration in the range of SiF4 mass fractions of 0.7–0.98. The results of the experiment have been compared with the data of calculation according to the classical physical and mathematical model of the exothermic reaction wave propagation in a porous medium during gas blowing. The similarities and differences have been established between the experimental and calculated values of the maximum temperature in the reaction front, the linear velocity of the combustion wave propagation, and the conversion of the solid-phase reagent.

Chromatography-mass-spectrometry was used to examine the stability of admixtures of C1−C7 hydrocarbons, fluorine and chlorinated derivatives of hydrocarbons, alkyl derivatives of silane, homologs of monosilane, and siloxanes in monosilane in its storage in molybdenum-glass ampules and stainless-steel cylinders. It was found that, in the case of storage in glass ampules, the concentration of ethylene and tetrafluoroethylene admixtures decreases and that of ethyl silane and disilane increases. When monosilane is stored in a stainless steel cylinder, the concentration of the acetylene admixture it contains changes.

Possibility of performing a mechanically activated synthesis of pure monosilane by the reaction of calcium hydride with silicon tetrafluoride in a rotating flow-through reactor containing milling bodies was analyzed. A number of operation parameters of the grinding reactor were theoretically evaluated and experimentally determined.

The possibility of preparing high-purity silicon tetrafluoride by the thermal dissociation of pure grade Na2SiF6 was studied. The impurity composition of the product was studied by IR and atomic emission spectroscopy and by mass spectrometry.