19 results on '"Steffen F"'
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2. Interaction of RET and MDP: optimization for reducing the mask writing time.
3. An agile mask data preparation and writer dispatching approach.
4. OASIS-based unification of mask data representation.
5. OASIS: progress on implementing the new stream format for containing data size explosion.
6. Distributed processing in integrated data preparation flow.
7. MEEF-based mask inspection.
8. New stream format: progress report on containing data size explosion.
9. Optimization of the data preparation for variable-shape beam mask writing machines.
10. Statistical data assessment for optimization of data preparation and manufacturing.
11. High-performance fracturing for variable shaped beam mask writing machines.
12. Integration of OPC and mask data preparation.
13. Parallel processing approaches in RET and MDP: new hybrid multithreading and distributed technology for optimum throughput in a hierarchical flow.
14. Optimization of data handling prior to fracturing for reduction of mask writing time.
15. Model-based OPC considering process window aspects: a study.
16. Lithographic comparison of assist feature design strategies.
17. GDS-based Mask Data Preparation Flow: Data Volume Containment by Hierarchical Data Processing.
18. Advanced lithography kits: serifs and hammerhead.
19. Etched bonded silicon wafers as test objects for the resolution power of subsurface voids.
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