6 results on '"Kühnel, Michael"'
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2. A combined laser scanning and DLW tool for measuring and fabrication tasks with NPMM.
3. Laser-microfabrication with accurate positioning and metrological traceability.
4. Diffraction compensation of slope errors on strongly curved grating substrates
5. Laser-microfabrication with accurate positioning and metrological traceability
6. A combined laser scanning and DLW tool for measuring and fabrication tasks with NPMM
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