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Laser-microfabrication with accurate positioning and metrological traceability.

Authors :
Weidenfeller, Laura
Kirchner, Johannes
Hofmann, Martin
Kühnel, Michael
Reinhardt, Carsten
Rangelow, Ivo
Manske, Eberhard
Source :
Proceedings of SPIE; 12/24/2018, Vol. 10930, p109300L-1-109300L-8, 8p
Publication Year :
2018

Details

Language :
English
ISSN :
0277786X
Volume :
10930
Database :
Complementary Index
Journal :
Proceedings of SPIE
Publication Type :
Conference
Accession number :
137102274
Full Text :
https://doi.org/10.1117/12.2508248