1. Determination of Spatial Distributions of Plasma Parameters of a Compact Magnetron Discharge.
- Author
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Gradov, V. M., Zimin, A. M., Serushkin, S. V., and Zemtsov, I. A.
- Subjects
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MAGNETRONS , *PLASMA density , *ELECTRON density , *ELECTRON plasma , *PLASMA temperature , *SPATIAL distribution (Quantum optics) , *MAGNETRON sputtering - Abstract
In this paper, the hardware-software high resolution measuring system for studying the spatial and spectral distributions of the radiation intensity of a magnetron discharge is described. The emission spectra are recorded and processed for subsequent determination of the temperature and density of plasma electrons. These parameters are calculated on the basis of a technique suggesting the absence of ionization equilibrium and the Boltzmann distribution of populations of energy levels of the plasma-forming gas. The data on the electron density, atomic distributions by excited states, and the degree of their deviation from equilibrium in the entire volume of the discharge are presented. [ABSTRACT FROM AUTHOR]
- Published
- 2019
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