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Determination of Spatial Distributions of Plasma Parameters of a Compact Magnetron Discharge.
- Source :
-
Physics of Atomic Nuclei . Dec2019, Vol. 82 Issue 10, p1376-1381. 6p. 2 Illustrations. - Publication Year :
- 2019
-
Abstract
- In this paper, the hardware-software high resolution measuring system for studying the spatial and spectral distributions of the radiation intensity of a magnetron discharge is described. The emission spectra are recorded and processed for subsequent determination of the temperature and density of plasma electrons. These parameters are calculated on the basis of a technique suggesting the absence of ionization equilibrium and the Boltzmann distribution of populations of energy levels of the plasma-forming gas. The data on the electron density, atomic distributions by excited states, and the degree of their deviation from equilibrium in the entire volume of the discharge are presented. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 10637788
- Volume :
- 82
- Issue :
- 10
- Database :
- Academic Search Index
- Journal :
- Physics of Atomic Nuclei
- Publication Type :
- Academic Journal
- Accession number :
- 142314319
- Full Text :
- https://doi.org/10.1134/S1063778819100107