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We investigate the structural and quantum transport properties of isotopically enriched Si28/SiO228 stacks deposited on 300-mm Si wafers in an industrial CMOS fab. Highly uniform films are obtained with an isotopic purity greater than 99.92%. Hall-bar transistors with an oxide stack comprising 10 nm of Si28O2 and 17 nm of Al2O3 (equivalent oxide thickness of 17 nm) are fabricated in an academic cleanroom. A critical density for conduction of 1.75×1011cm-2 and a peak mobility of 9800cm2/Vs are measured at a temperature of 1.7 K. The Si28/SiO228 interface is characterized by a roughness of Δ=0.4nm and a correlation length of Λ=3.4nm. An upper bound for valley splitting energy of 480μeV is estimated at an effective electric field of 9.5 MV/m. These results support the use of wafer-scale Si28/SiO228 as a promising material platform to manufacture industrial spin qubits.

Quantum processors rely on classical electronic controllers to manipulate and read out the quantum state. As the performance of the quantum processor improves, non-idealities in the classical controller can become the performance bottleneck for the whole quantum computer. To prevent such limitation, this paper presents a systematic study of the impact of the classical electrical signals on the qubit fidelity. All operations, i.e. single-qubit rotations, two-qubit gates and read-out, are considered, in the presence of errors in the control electronics, such as static, dynamic, systematic and random errors. Although the presented study could be extended to any qubit technology, it currently focuses on single-electron spin qubits, because of several advantages, such as purely electrical control and long coherence times, and for their potential for large-scale integration. As a result of this study, detailed electrical specifications for the classical control electronics for a given qubit fidelity can be derived, as demonstrated with specific case studies. We also discuss the effect on qubit fidelity of the performance of the general-purpose room-temperature equipment that is typically employed to control the few qubits available today. Ultimately, we show that tailor-made electronic controllers can achieve significantly lower power, cost and size, as required to support the scaling up of quantum computers.