1. Preparation of Perovskite Structure K(Ta0.65Nb0.35)O3 Films by Pulsed Laser Deposition on Si Substrates
- Author
-
Zi-Sen Zhao, Shi-Min Wang, Duan-Ming Zhang, Zhong-Jun Chen, De-Sheng Xu, Xiao-Dong Wang, and Wei-Dong Ma
- Subjects
Materials science ,Potassium niobate ,business.industry ,Mineralogy ,Dielectric ,Coercivity ,Condensed Matter Physics ,Microstructure ,Ferroelectricity ,Electronic, Optical and Magnetic Materials ,Pulsed laser deposition ,law.invention ,Capacitor ,chemistry.chemical_compound ,chemistry ,law ,Optoelectronics ,Thin film ,business - Abstract
Highly oriented and perovskite structure KTN (potassium tantalate-niobate) thin films were fabricated by pulsed laser deposition technique on Si(100) substrates. The surface of the thin films is homogeneous, crack-free and dense. The ferroelectric measurement was carried out on metal-ferroelectric-metal capacitors and the remanent polarization and the coercive field were 8.66 μC/cm 2 and 7.44 kV/cm, respectively. The effects of the substrate temperature, laser energy density on the target and oxygen pressure during the deposition process on the structure of thin films were discussed.
- Published
- 1999