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Start Over Descriptor "SCANNING electron microscopes" Search Limiters Peer Reviewed Topic electron gas Journal nuclear instruments & methods in physics research section a
1 results on '"SCANNING electron microscopes"'

1. Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM

Author

Neděla, V., Konvalina, I., Lencová, B., and Zlámal, J.

Subjects
*SCANNING electron microscopes, *SIGNAL processing, *VAPORS, *PRESSURE, *ELECTRON gas, *MONTE Carlo method, *COMPARATIVE studies
Abstract

Abstract: This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models. [Copyright &y& Elsevier]

Published
2011
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