Back to Search
Start Over
Comparison of calculated, simulated and measured signal amplification in a variable pressure SEM
- Source :
-
Nuclear Instruments & Methods in Physics Research Section A . Jul2011, Vol. 645 Issue 1, p79-83. 5p. - Publication Year :
- 2011
-
Abstract
- Abstract: This paper presents computed dependencies of signal amplification of detected electrons on the water vapor pressure in a variable pressure SEM using the EOD software equipped with a Monte Carlo plug-in. We analyze the amplification at selected energies of signal electrons going through a high-pressure water vapor and total signal amplification by including a realistic simulation of the secondary emission from sample. The results are compared with experimental measurements and the dependencies of published analytical models. [Copyright &y& Elsevier]
Details
- Language :
- English
- ISSN :
- 01689002
- Volume :
- 645
- Issue :
- 1
- Database :
- Academic Search Index
- Journal :
- Nuclear Instruments & Methods in Physics Research Section A
- Publication Type :
- Academic Journal
- Accession number :
- 61464799
- Full Text :
- https://doi.org/10.1016/j.nima.2010.12.200