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Recently, integrated flexible devices based on silicon nanowires (Si-NWs) have received significant attention as high performance flexible devices. However, most previous assembly methods can generate only specifically-shaped devices and require unconventional facilities, which has been a major hurdle for industrial applications. Herein, we report a simple but very efficient method for assembling Si-NWs into virtually generally-shape patterns on flexible substrates using only conventional microfabrication facilities, allowing us to mass-produce highly flexible low-noise devices. As proof of this method, we demonstrated the fabrication of highly bendable top-gate transistors based on Si-NWs. These devices showed typical n-type semiconductor behaviors, and exhibited a much lower noise level compared to previous flexible devices based on organic conductors or other nanowires. In addition, the gating behaviors and low-noise characteristics of our devices were maintained, even under highly bent conditions.

Nanoscale sensors based on single-walled carbon nanotube (SWNT) networks have been considered impractical due to several fundamental limitations such as a poor sensitivity and small signal-to-noise ratio. Herein, we present a strategy to overcome these fundamental problems and build highly-sensitive low-noise nanoscale sensors simply by controlling the structure of the SWNT networks. In this strategy, we prepared nanoscale width channels based on aligned SWNT networks using a directed assembly strategy. Significantly, the aligned network-based sensors with narrower channels exhibited even better signal-to-noise ratio than those with wider channels, which is opposite to conventional random network-based sensors. As a proof of concept, we demonstrated 100 nm scale low-noise sensors to detect mercury ions with the detection limit of approximately 1 pM, which is superior to any state-of-the-art portable detection system and is below the allowable limit of mercury ions in drinking water set by most government environmental protection agencies. This is the first demonstration of 100 nm scale low-noise sensors based on SWNT networks. Considering the increased interests in high-density sensor arrays for healthcare and environmental protection, our strategy should have a significant impact on various industrial applications.

We have developed a method to selectively assemble and align carbon nanotubes (CNTs) on soft substrates for use as flexible biosensors. In this strategy, a thin oxide layer was deposited on soft substrates via low temperature plasma enhanced chemical vapor deposition, and a linker-free assembly process was applied on the oxide surface where the assembly of carbon nanotubes was guided by methyl-terminated molecular patterns on the oxide surface. The electrical characterization of the fabricated CNT devices exhibited a typical p-type gating effect and 1/f noise behavior. The bare oxide regions near CNTs were functionalized with glutamate oxidase to fabricate selective biosensors to detect two forms of glutamate substances existing in different situations: L-glutamic acid, a neurotransmitting material, and monosodium glutamate, a food additive.