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Start Over Author "Bizjak T" Journal microlithography world
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1. Innovative refractive optics for exposure tool illumination

Author

Bizjak, T., Mitra, T., Homburg, O., Hauschild, D., and Aschke, L.

Subjects
Masks (Electronics) -- Properties -- Usage, Semiconductor lasers -- Usage
Abstract

Arrays of refractive micro-optics are ideal homogenizing elements in illumination systems for exposure and metrology tools. Such arrays can provide profiles with uniformity significantly better than 1% peak-to-valley at numerical […]

Published
2008

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