Back to Search
Start Over
Innovative refractive optics for exposure tool illumination
- Source :
- Microlithography World. May, 2008, Vol. 17 Issue 2, p14, 3 p.
- Publication Year :
- 2008
-
Abstract
- Arrays of refractive micro-optics are ideal homogenizing elements in illumination systems for exposure and metrology tools. Such arrays can provide profiles with uniformity significantly better than 1% peak-to-valley at numerical […]
- Subjects :
- Masks (Electronics) -- Properties -- Usage
Semiconductor lasers -- Usage
Subjects
Details
- Language :
- English
- ISSN :
- 1074407X
- Volume :
- 17
- Issue :
- 2
- Database :
- Gale General OneFile
- Journal :
- Microlithography World
- Publication Type :
- Periodical
- Accession number :
- edsgcl.184854578