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Start Over Descriptor "*PHOTOMASK manufacturing" Journal microlithography world

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1 results on '"*PHOTOMASK manufacturing"'

1. Mask rule standards: A baby step for DfM.

Author

Mason, Mark

Subjects
*STANDARDS, *MASKS (Electronics), *INTEGRATED circuit design, *FACTORIES, *MANUFACTURING processes, *PHOTOMASK manufacturing
Abstract

Features the standardized mask design rules (MDR) for the manufacturing of integrated circuits. Challenges facing a photomask manufacturing facility; Definition of MDR; Tools utilized by the mask manufacturing process.

Published
2006

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