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Start Over Author "Zhang, Q. C." Journal journal of applied physics
2 results on '"Zhang, Q. C."'

1. Composition, residual stress, and structural properties of thin tungsten nitride films deposited by reactive magnetron sputtering.

Author

Shen, Y. G., Mai, Y. W., McKenzie, D. R., Zhang, Q. C., McFall, W. D., and McBride, W. E.

Subjects
THIN films, TUNGSTEN compounds
Abstract

Reports that thin tungsten nitride films were produced by reactive dc magnetron sputtering of tungsten in an Ar-N2 gas mixture. Effects of the variation of nitrogen partial pressure on the composition, residual stress and structural properties of the thin films; Analysis of the films in situ by a cantilever beam technique.

Published
2000
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