1. InxGa(1-x)N/InyGa(1-y)N superlattices grown on GaN films
- Author
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Shuji Nakamura, Takashi Mukai, Masayuki Senoh, Shin-ichi Nagahama, and Naruhito Iwasa
- Subjects
Superlattices as materials -- Research ,Gallium compounds -- Usage ,Thin films -- Usage ,Chemical vapor deposition -- Usage ,Physics - Abstract
Two-flow metalorganic chemical-vapor deposition method facilitates the growth of high-quality Indalium Gallium Nitride (In Ga N) superlattices on the surface of Gallium Nitride (Ga N) films. Satellite peaks detected by double-crystal X-ray rocking curve measurements reveal the occurrence of In0.22Ga0.78N/In0.06Ga0.94N superlattices. Room-temperature photoluminescence measurements facilitate the observation of quantum effects and are used for the comparative analysis of In0.22Ga0.78N/In0.06Ga0.94N superlattices.
- Published
- 1993