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The kinetic process behind radio frequency discharges in SF6 was investigated using space- and time-resolved emission spectroscopy. The behavior of the second positive and the first negative bands of nitrogen showed that the double layers formed in front of the anode and the double-layer-induced emission was the most prominent feature in the emission profle. Emission originating from the bulk at low and high frequencies was attributed to low-energy electrons.

Time- and space-resolved optical emission spectroscopy is employed in the study of the methane and hydrogen radio frequency discharges at 13.56 megahertz and at 100 kilohertz. The emission intensities are derived and observed emissions are plotted and evaluated. The minimum voltage sustaining a steady-state glow discharge in the sample gases are observed while their voltage-current characteristics are analyzed. The three samples consisted of pure methane, pure hydrogen and a mixture of 10% methane and 100% hydrogen. Quenching and net-excitation rates as well as net-excitation spatiotemporal profiles are evaluated in the study of the discharge structure.

Presents a study that investigated the electrical characteristics of radio frequency discharges in sulfur (S)-fluorine (F) and its mixtures with nitrogen. Use of emission spectroscopy; Importance of radio frequency discharges in SF; Schematic diagram of experimental apparatus and systems.

Presents a study that investigated the frequency dependence of the sustaining voltage in a radio frequency discharge under minimum sustaining and constant power conditions in argon. Measurement of spatiotemporal net excitation rate of argon; Background on low-pressure radio frequency plasmas; Importance of ion bombardment energy.

Focuses on a study that investigated the influence of negative ions on the structure in radio frequency glow discharges in SiH[sub4]/H[sub2] by spatiotemporal optical emission spectroscopy. Method used to synthesize thin films; Description of the experimental apparatus used; Minimum sustaining voltages in various gases measured.