1. Simple method for fabrication of diamond nanowires by inductively coupled plasma reactive ion etching
- Author
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Kouichi Semba, Takao Aoki, Kentaro Wakui, Masahiro Takeoka, and Yuya Yonezu
- Subjects
SIMPLE (dark matter experiment) ,Fabrication ,Materials science ,Physics and Astronomy (miscellaneous) ,General Engineering ,Analytical chemistry ,Nanowire ,General Physics and Astronomy ,Diamond ,02 engineering and technology ,Edge (geometry) ,engineering.material ,021001 nanoscience & nanotechnology ,01 natural sciences ,010309 optics ,Aluminum coating ,0103 physical sciences ,engineering ,Reactive-ion etching ,Inductively coupled plasma ,0210 nano-technology - Abstract
Diamond nanowires are fabricated on a bulk, single crystalline diamond near an edge of aluminum coating using inductively coupled plasma reactive ion etching. Two different density areas are simultaneously appeared where the dense area has 9 times higher density than that of the sparse area while keeping the size of nanowires almost uniform in these areas. The nanowire sizes realized in the dense (sparse) area are 858 ± 22 nm (876 ± 25 nm) in height and 126 ± 6 nm (124 ± 7 nm) in diameter, which is suitable for applications in optical quantum information processing.
- Published
- 2017