17 results on '"Law, Mark A."'
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2. Effect of proton irradiation on AlGaN/GaN high electron mobility transistor off-state drain breakdown voltage
3. Kinetics of the end of range damage dissolution in flash-assist rapid thermal processing
4. Kinetics of boron reactivation in doped silicon from Hall effect and spreading resistance techniques
5. Dependence of boron cluster dissolution on the annealing ambient
6. Experimental identification of nitrogen-vacancy complexes in nitrogen implanted silicon
7. Accurate measurements of the intrinsic diffusivities of boron and phosphorus in silicon
8. Energy dependence of transient enhanced diffusion and defect kinetics
9. Effect of arsenic doping on {311} defect dissolution in silicon
10. Cross-sectional transmission electron microscopy analysis of {311} defects from Si implantation into silicon
11. The effect of dose rate on interstitial release from the end-of-range implant damage region in silicon
12. Diffusion‐limited interaction of dislocation loops and interstitials during dry oxidation in silicon
13. Two‐dimensional study on the effects of nonamorphizing silicon implantation damage on phosphorus diffusion
14. Phosphorus diffusion in isoconcentration backgrounds under inert conditions in silicon
15. Effects of low‐dose Si implantation damage on diffusion of phosphorus and arsenic in Si
16. Effect of proton irradiation on AlGaN/GaN high electron mobility transistor off-state drain breakdown voltage.
17. Diffusion-limited interaction of dislocation loops and interstitials during dry oxidation in....
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