1. The effect of Ta interface on the crystallization of amorphous phase change material thin films
- Author
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Giada Ghezzi, Nicolas Bernier, Françoise Hippert, C. Sabbione, M. Marra, Janina Ferrand, Sylvain Maitrejean, Pierre Noé, F. Fillot, Laboratoire des matériaux et du génie physique (LMGP ), Institut National Polytechnique de Grenoble (INPG)-Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), Centre de Recherches sur les Macromolécules Végétales (CERMAV), Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)-Université Joseph Fourier - Grenoble 1 (UJF), Aracruz (Europe), Università degli Studi di Roma Tor Vergata [Roma], Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information (CEA-LETI), Direction de Recherche Technologique (CEA) (DRT (CEA)), Commissariat à l'énergie atomique et aux énergies alternatives (CEA)-Commissariat à l'énergie atomique et aux énergies alternatives (CEA), Laboratoire Géomatériaux et Environnement (LGE), Université Paris-Est Marne-la-Vallée (UPEM), Institut polytechnique de Grenoble - Grenoble Institute of Technology (Grenoble INP )-Institut National Polytechnique de Grenoble (INPG)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS), and Université Joseph Fourier - Grenoble 1 (UJF)-Institut de Chimie du CNRS (INC)-Centre National de la Recherche Scientifique (CNRS)
- Subjects
010302 applied physics ,Diffraction ,Oxide minerals ,Materials science ,Physics and Astronomy (miscellaneous) ,Tantalum ,chemistry.chemical_element ,[CHIM.MATE]Chemical Sciences/Material chemistry ,02 engineering and technology ,021001 nanoscience & nanotechnology ,Cladding (fiber optics) ,01 natural sciences ,law.invention ,Amorphous solid ,Crystallography ,chemistry ,law ,0103 physical sciences ,X-ray crystallography ,Crystallization ,Thin film ,Composite material ,0210 nano-technology - Abstract
International audience; The crystallization of amorphous GeTe and Ge2Sb2Te5 phase change material films, with thickness between 10 and 100 nm, sandwiched between either Ta or SiO2 layers, was investigated by optical reflectivity. Ta cladding layers were found to increase the crystallization temperature, even for films as thick as 100 nm. X-Ray diffraction investigations of crystallized GeTe films showed a very weak texture in Ta cladded films, in contrast with the strong texture observed for SiO2 cladding layers. This study shows that crystallization mechanism of phase change materials can be highly impacted by interface effects, even for relatively thick films. (C) 2014 AIP Publishing LLC.
- Published
- 2014
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