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Etching suspended superconducting tunnel junctions from a multilayer
- Source :
- Applied Physics Letters, Applied Physics Letters, 2012, 100, pp.252602. ⟨10.1063/1.4729779⟩, Applied Physics Letters, American Institute of Physics, 2012, 100, pp.252602. ⟨10.1063/1.4729779⟩
- Publication Year :
- 2012
- Publisher :
- AIP Publishing, 2012.
-
Abstract
- A method to fabricate large-area superconducting hybrid tunnel junctions with a suspended central normal metal part is presented. The samples are fabricated by combining photo-lithography and chemical etch of a superconductor—insulator—normal metal multilayer. The process involves few fabrication steps, is reliable and produces extremely high-quality tunnel junctions. Under an appropriate voltage bias, a significant electronic cooling is demonstrated. We analyze semi-quantitatively the thermal behavior of a typical device.
- Subjects :
- Josephson effect
Fabrication
Materials science
Physics and Astronomy (miscellaneous)
FOS: Physical sciences
Physics::Optics
Nanotechnology
02 engineering and technology
01 natural sciences
law.invention
Superconductivity (cond-mat.supr-con)
law
Etching (microfabrication)
Condensed Matter::Superconductivity
parasitic diseases
0103 physical sciences
Thermal
010306 general physics
Superconductivity
business.industry
Condensed Matter - Superconductivity
technology, industry, and agriculture
Condensed Matter::Mesoscopic Systems and Quantum Hall Effect
021001 nanoscience & nanotechnology
Computer Science::Other
[PHYS.COND.CM-S]Physics [physics]/Condensed Matter [cond-mat]/Superconductivity [cond-mat.supr-con]
Optoelectronics
Superconducting tunnel junction
Photolithography
0210 nano-technology
business
Voltage
Subjects
Details
- ISSN :
- 10773118 and 00036951
- Volume :
- 100
- Database :
- OpenAIRE
- Journal :
- Applied Physics Letters
- Accession number :
- edsair.doi.dedup.....bf85275eb08e5cb080304960dd10c05f
- Full Text :
- https://doi.org/10.1063/1.4729779