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Combining the energy limit theory and the ANSYS finite element simulation analysis, this paper has designed the new integrated quartz crystal resonator and has used oscillator circuits to carry on the experimental comparison on its temperature-frequency characteristic in high-low temperature chamber. The experimental results show that the curve of its temperature-frequency characteristic is cubic in the coordinate system, which is basically consistent with that of the single electrode resonator. The frequency change of each resonator on the same substrate is basically the same when they are in the same circumstance and stimulation. According these similarities, this paper can implement differential processing on output frequencies of different resonators on the same substrate, which can effectively restrain the influence that temperature imposes on frequency.

By analysing the wafer, the electrodes, etc. according to the energy limit theory and the ANSYS finite element simulation, in this paper the author has designed the integrated quartz crystal resonator and oscillator circuit, and has carried on the experimental comparison on the stability of the integrated resonators, which have different structure, different electrode material and thickness. The experimental results show that the frequency stability of quartz crystal resonator is not only related with the electrode material and thickness, but also related with the structure. Under the same condition, resonator of asymmetric structure has better frequency stability, and the stability of Au-electrode was better than others, and its magnitude could reach 10 10. With the increase of the electrode thickness, the resonator oscillator stability will be improved.

Analyzing stress distribution of the thin circular quartz wafer subjected the radial force through the ANSYS finite element simulation, as well as the theoretical simulation, this paper designed two integrated quartz resonators with different structures and carried on experiments on force-frequency characteristic of resonators. The experimental results show that the resonators force-frequency characteristic is not only closely related to adding force azimuth, but also the electrode size and position. And when force azimuths are same, integrated resonator with asymmetric structure has better force-frequency characteristic, its force-frequency conversion coefficient could achieve 551.8Hz/N after electrode was evaporated with Au.