Study on the Design and the Stability of Integrated Quartz Resonator

By analysing the wafer, the electrodes, etc. according to the energy limit theory and the ANSYS finite element simulation, in this paper the author has designed the integrated quartz crystal resonator and oscillator circuit, and has carried on the experimental comparison on the stability of the integrated resonators, which have different structure, different electrode material and thickness. The experimental results show that the frequency stability of quartz crystal resonator is not only related with the electrode material and thickness, but also related with the structure. Under the same condition, resonator of asymmetric structure has better frequency stability, and the stability of Au-electrode was better than others, and its magnitude could reach 10 10. With the increase of the electrode thickness, the resonator oscillator stability will be improved.