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Start Over Author "Hsin-Yu Ko" Journal acs applied materialsinterfaces
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1. Competitive Adsorption as a Route to Area-Selective Deposition

Author

Pengyuan Zhao, Jonathan Wong, Ka Un Lao, Yan Yang, Hsin-Yu Ko, Robert A. DiStasio, Taewon Suh, and James R. Engstrom

Subjects
Work (thermodynamics), Materials science, Competitive adsorption, Chemical engineering, General Materials Science, Chemical vapor deposition, Selective deposition
Abstract

In this work, we have explored the use of a third species during chemical vapor deposition (CVD) to direct thin-film growth to occur exclusively on one surface in the presence of another. Using a combination of density functional theory (DFT) calculations and experiments, including in situ surface analysis, we have examined the use of 4-octyne as a coadsorbate in the CVD of ZrO

Published
2020

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