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Start Over Author "Man Hoi Wong" Journal 2006 64th device research conference
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1. Improved processing technology for GaN-capped deeply-recessed GaN HEMTs without surface passivation

Author

L. McCarthy, S. P. DenBaars, L. Shen, Christiane Poblenz, Sarah L. Keller, A. Corrion, Man Hoi Wong, James S. Speck, Umesh K. Mishra, and Tomas Palacios

Subjects
Aluminum gallium nitride, chemistry.chemical_compound, Materials science, Passivation, chemistry, business.industry, Etching (microfabrication), Electronic engineering, Optoelectronics, Gallium nitride, business
Published
2006

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