6 results on '"Namba, Keisuke"'
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2. Multicusp Electron-Cyclotron-Resonance Plasma Source Working with Microwaves Radially Injected through an Annular Slit
3. \bfiIn situ Monitoring of Product Species in Plasma Etching by Fourier Transform Infrared Absorption Spectroscopy
4. Platinum Etching and Plasma Characteristics in RF Magnetron and Electron Cyclotron Resonance Plasmas
5. Simulation of Ion Trajectories near Submicron-Patterned Surface Including Effects of Local Charging and Ion Drift Velocity toward Wafer
6. Chemical Kinetics of Chlorine in Electron Cyclotron Resonance Plasma Etching of Si
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