18 results on '"Ikota, Masami"'
Search Results
2. Metrology of thin resist for high NA EUVL
3. Visualization of 3D structure of semiconductor devices by "Dig and See" using GFIS-SIM
4. Linewidth and roughness measurement of SAOP by using FIB and Planer-TEM as reference metrology
5. Measurement of pattern roughness and local size variation using CD-SEM: current status
6. Line-width roughness of advanced semiconductor features by using FIB and planar-TEM as reference metrology
7. Contact inspection of Si nanowire with SEM voltage contrast
8. The need for LWR metrology standardization: the imec roughness protocol
9. Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element
10. 3D-profile measurement of advanced semiconductor features by using FIB as reference metrology
11. e-beam metrology of thin resist for high NA EUVL
12. 3D-profile measurement of advanced semiconductor features by reference metrology
13. EB metrology of Ge channel gate-all-around FET: buckling evaluation and EB damage assessment
14. How to measure a-few-nanometer-small LER occurring in EUV lithography processed feature
15. Enabling CD SEM metrology for 5nm technology node and beyond
16. Advanced CD-SEM metrology for qualification of DSA patterns using coordinated line epitaxy (COOL) process
17. Process monitor of 3D-device features by using FIB and CD-SEM
18. Line profile measurement of advanced-FinFET features by reference metrology
Catalog
Books, media, physical & digital resources
Discovery Service for Jio Institute Digital Library
For full access to our library's resources, please sign in.