311 results on '"J. W. Brown"'
Search Results
2. Light sources for high-volume manufacturing EUV lithography: technology, performance, and power scaling
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Mathew Abraham, Rob Rafac, Georgiy O. Vaschenko, Andrew LaForge, Bruno La Fontaine, Daniel J. Riggs, Yezheng Tao, Matthew J. Graham, Ted Taylor, M. Vargas, Michael Kats, Slava Rokitski, Alexander Schafgans, Igor V. Fomenkov, Daniel J. W. Brown, Silvia De Dea, David C. Brandt, Michael Purvis, Alex I. Ershov, Steven Chang, and Jayson Stewart
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010302 applied physics ,Materials science ,business.industry ,Extreme ultraviolet lithography ,02 engineering and technology ,021001 nanoscience & nanotechnology ,01 natural sciences ,Atomic and Molecular Physics, and Optics ,High volume manufacturing ,Electronic, Optical and Magnetic Materials ,0103 physical sciences ,Multiple patterning ,Optoelectronics ,X-ray lithography ,Laser power scaling ,0210 nano-technology ,business ,Instrumentation ,Lithography ,Next-generation lithography ,Immersion lithography - Abstract
Extreme ultraviolet (EUV) lithography is expected to succeed in 193-nm immersion multi-patterning technology for sub-10-nm critical layer patterning. In order to be successful, EUV lithography has to demonstrate that it can satisfy the industry requirements in the following critical areas: power, dose stability, etendue, spectral content, and lifetime. Currently, development of second-generation laser-produced plasma (LPP) light sources for the ASML’s NXE:3300B EUV scanner is complete, and first units are installed and operational at chipmaker customers. We describe different aspects and performance characteristics of the sources, dose stability results, power scaling, and availability data for EUV sources and also report new development results.
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- 2017
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3. Scaling LPP EUV sources to meet high volume manufacturing requirements (Conference Presentation)
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Georgiy O. Vaschenko, Michael Purvis, Yezheng Tao, Robert J. Rafac, Slava Rokitski, Igor V. Fomenkov, Alexander Schafgans, David C. Brandt, and Daniel J. W. Brown
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Computer science ,business.industry ,Extreme ultraviolet lithography ,media_common.quotation_subject ,02 engineering and technology ,Plasma ,021001 nanoscience & nanotechnology ,Laser ,01 natural sciences ,High volume manufacturing ,law.invention ,010309 optics ,Presentation ,Optics ,law ,Extreme ultraviolet ,0103 physical sciences ,Systems engineering ,Key (cryptography) ,Laser power scaling ,0210 nano-technology ,business ,Scaling ,media_common - Abstract
In this paper, we provide an overview of various challenges and their solutions for scaling laser-produced-plasma (LPP) extreme-ultraviolet (EUV) source performance to enable high volume manufacturing. We will discuss improvements to source architecture that facilitated the increase of EUV power from 100W to >200W, and the technical challenges for power scaling of key source parameters and subsystems. Finally, we will describe current power-scaling research activities and provide a forward looking perspective for LPP EUV sources towards 500W.
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- 2017
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4. Advancements in predictive plasma formation modeling
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Michael Purvis, Alexander Schafgans, Rob Rafac, Alberto Pirati, Slava Rokitski, Igor V. Fomenkov, Mathew Abraham, Howard A. Scott, Aaron Fisher, Ted Taylor, Daniel J. W. Brown, Alice Koniges, M. Vargas, A. Link, Steven H. Langer, David C. Eder, Spencer Rich, Scott Wilks, Yezheng Tao, Josh Brown, and David C. Brandt
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010302 applied physics ,Plasma formation ,business.industry ,Computer science ,Extreme ultraviolet lithography ,chemistry.chemical_element ,Plasma ,Laser ,01 natural sciences ,010305 fluids & plasmas ,Pulse (physics) ,law.invention ,Optics ,chemistry ,law ,0103 physical sciences ,Aerospace engineering ,business ,Tin ,Scaling - Abstract
We present highlights from plasma simulations performed in collaboration with Lawrence Livermore National Labs. This modeling is performed to advance the rate of learning about optimal EUV generation for laser produced plasmas and to provide insights where experimental results are not currently available. The goal is to identify key physical processes necessary for an accurate and predictive model capable of simulating a wide range of conditions. This modeling will help to drive source performance scaling in support of the EUV Lithography roadmap. The model simulates pre-pulse laser interaction with the tin droplet and follows the droplet expansion into the main pulse target zone. Next, the interaction of the expanded droplet with the main laser pulse is simulated. We demonstrate the predictive nature of the code and provide comparison with experimental results.
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- 2016
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5. A glimpse of undiscovered insect diversity: A collection of 150 new taxa of insects (cover)
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Silvio Shigueo Nihei, J. H. Martin, J. Forrester, C. Rasmussen, M. Buffington, Robert S. Anderson, K. Johnson, P. D. Perkins, D. Rentz, Wojciech Giłka, J. W. Brown, Daniel J. Bickel, C. Schaefer, H. Fery, Zhi-Qiang Zhang, L. F. Gall, Q. Wang, Laurence A. Mound, A. B. T. Smith, Christopher G. Majka, Bradley J. Sinclair, F. F. Salles, J. C. Morse, Mallik B. Malipatil, Boris C. Kondratieff, and Jan Klimaszewski
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Taxon ,Ecology ,media_common.quotation_subject ,Animal Science and Zoology ,Cover (algebra) ,Insect ,Biology ,Ecology, Evolution, Behavior and Systematics ,Diversity (politics) ,media_common - Published
- 2012
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6. Scale-Up and Continuation of Antiretroviral Therapy in South African Treatment Programs, 2005–2009
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Celicia Serenata, Melinda Wilson, Jeffrey D. Klausner, Thurma Goldman, Christine L. Mattson, Thobile Mbengashe, Heidi O'Bra, and J. W. Brown
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Adult ,Male ,medicine.medical_specialty ,Adolescent ,Anti-HIV Agents ,Alternative medicine ,Developing country ,HIV Infections ,South Africa ,Young Adult ,Acquired immunodeficiency syndrome (AIDS) ,Antiretroviral Therapy, Highly Active ,medicine ,Humans ,Pharmacology (medical) ,Young adult ,Child ,Aged ,Retrospective Studies ,Aged, 80 and over ,Government ,business.industry ,Infant, Newborn ,Infant ,Capacity building ,Retrospective cohort study ,Middle Aged ,medicine.disease ,Antiretroviral therapy ,Infectious Diseases ,Child, Preschool ,Family medicine ,Physical therapy ,Female ,business - Abstract
BACKGROUND: South Africa has the greatest burden of HIV-infection in the world with about 5.2 million HIV-infected adults. In 2003, the South African Government launched a comprehensive HIV and AIDS care treatment program supported by the United States in 2004 through the President's Emergency Plan for AIDS Relief (PEPFAR). METHODS: To describe the scale-up and continuation of antiretroviral therapy in South African Government and PEPFAR-supported sites in South Africa, we conducted a retrospective analysis of routinely collected program reporting data, 2005-2009. RESULTS: From 2005 through 2009, the average rate of persons initiated on antiretroviral therapy in PEPFAR-supported South African Government treatment programs increased nearly four-fold from 6,327 a month in 2005-2006 to 24,622 a month in 2008-2009 resulting in an increase from 33,543 patients on continued treatment in April-June 2005 to 631,985 patients in July-September 2009. Of those 631,985 patients receiving treatment, 65% were women. Men were more likely to be lost to follow-up (9.2% vs. 7.8%, PR 1.18, 95% CI 1.17-1.19) and more likely to die (5.6% vs. 4.1%, PR 1.36, 95% CI 1.35-1.37) than women. CONCLUSIONS: Scale-up and continuation of antiretroviral therapy in South Africa has been a remarkable medical accomplishment. Because more women receive and continue treatment, more efforts are needed to treat and retain men.
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- 2011
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7. Registro de platynota rostrana (Walker, 1863) (Lepidoptera: Tortricidae) en cítricos de México
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S. Varela-Fuentes, J. W. Brown, and G. Silva-Aguirre
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Horticulture ,Citrus limon ,Geography ,biology ,General Medicine ,biology.organism_classification ,Cartography ,Citrus × sinensis ,Platynota rostrana - Abstract
Platynota rostrana is recorded for the first time as citrus pests in Mexico, on Citrus sinensis and Citrus limon.
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- 2009
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8. The Continuation of Moore's Law
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Nigel R. Farrar and Daniel J. W. Brown
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Physics ,Moore's law ,business.industry ,Extreme ultraviolet lithography ,media_common.quotation_subject ,Nanotechnology ,Laser ,law.invention ,Continuation ,Optics ,law ,Power output ,business ,Scaling ,Lithography ,Electronic circuit ,media_common - Abstract
Moore's Law, which predicts thecontinued increase in device density onintegrated circuits, has been driven by advancesin lithography. Both resolutionand productivity of the exposure toolhave been enabled by the light sourcetechnology. The transition to shorterwavelength, first by introducing excimerlasers and more recently by developmentof EUV Laser Produced Plasma sources hasdriven resolution. In addition, the continuedcost effectiveness of lithography isdependent on the scaling of the power output for both types of source.
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- 2009
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9. High Dose 17 β-Estradiol and the α-Estrogen Agonist PPT Trigger Apoptosis in Human Adrenal Carcinoma Cells but the β-Estrogen Agonist DPN Does Not
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Carlos Perez-Stable, L. M. Fishman, J. W. Brown, and L. M. Prieto
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Agonist ,medicine.medical_specialty ,medicine.drug_class ,Endocrinology, Diabetes and Metabolism ,Clinical Biochemistry ,Adrenal Gland Neoplasms ,Alpha (ethology) ,Apoptosis ,Biochemistry ,Endocrinology ,Phenols ,Cell Line, Tumor ,Internal medicine ,Nitriles ,medicine ,Humans ,Receptor ,Dose-Response Relationship, Drug ,Estradiol ,Chemistry ,Biochemistry (medical) ,Estrogens ,General Medicine ,Cell cycle ,Flow Cytometry ,Dose–response relationship ,Receptors, Estrogen ,Estrogen ,Cell culture ,Pyrazoles ,Cell Division - Abstract
Previous studies have shown that high dose 17beta-estradiol (10 (-5) M) has a G2/M blocking effect in SW-13 human adrenal carcinoma cultures and strongly enhances apoptosis. To examine the differential effects of estrogen alpha and beta-receptors in this system, we incubated SW-13 cells with specific alpha- and beta-estrogen receptor agonists, PPT [4,4',4''-(propyl-[ (1)H]-pyrazole-1,3,5-triyl) trisphenol] and DPN [2,3-bis (4-hydroxyphenyl) propionitrile], respectively (each at 10 (-5) M). Flow cytometry was used to analyze the percentages of cells in various phases of the cell cycle [sub-G1 (apoptosis), G1, S, and G2/M] in each experimental condition. Exposure to 17 beta-estradiol for 48 hours increased apoptosis more than 5-fold (from 3.6+/-0.5 to 20+/-2.2% of cells; p
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- 2008
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10. A Detailed Study of the Effectiveness and Capabilities of 18th Century Musketry on the Battlefield
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N A Roberts, P D F Kingston, B Hammett, and J W Brown
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Archeology ,History ,Armour ,business.industry ,Single shot ,Musket ,Adversary ,Clothing ,Archaeology ,Battlefield ,Aeronautics ,Software deployment ,Shot (pellet) ,business - Abstract
During the mid 18th century, the standard British Army issue weapon was the Brown Bess Musket. There are various accounts of the performance of this early form of firearm and its tactical deployment (e.g. Hanger 1816). Using a technical replica of the Brown Bess, range trials and computer modelling have been used to asses the weapon's capabilities and likely performance. The research found the Brown Bess musket to be a lethal weapon at the ranges at which enemy was commonly engaged, so long as it was accurate enough to hit the target. A single shot fired at 150 yards could penetrate at least two soldiers, even if bone were hit. The armour of the day (shields of wood, leather and sometimes steel, and the layers of woollen clothing) was easily pierced by the shot. The shot was found to readily deform on impact with metal targets. The maximum range could extend to around 1200m, with 202m reached when fired horizontally.
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- 2008
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11. Studies on the Behavioral Correlates of Organic Brain Damage*
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Throne Fm, Schulman Jl, J. W. Brown, and Kaspar Jc
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business.industry ,Medicine ,Brain damage ,medicine.symptom ,business ,Neuroscience - Published
- 2015
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12. Performance optimization of MOPA pre-pulse LPP light source
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Daniel J. Riggs, Rick Sandstrom, Slava Rokitski, Igor V. Fomenkov, Yezheng Tao, Rob Rafac, Christian Wagner, Norbert R. Bowering, Wayne J. Dunstan, Georgiy O. Vaschenko, Noreen Harned, Ron Kool, Hans Meiling, Alexander Schafgans, Alberto Pirati, Matthew J. Graham, Nigel R. Farrar, Daniel J. W. Brown, David C. Brandt, Michael Purvis, and Alex I. Ershov
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Optics ,business.industry ,Computer science ,Extreme ultraviolet ,Extreme ultraviolet lithography ,Energy conversion efficiency ,Volume (computing) ,Electronic engineering ,business ,Lithography ,Die (integrated circuit) ,Power (physics) ,Pulse (physics) - Abstract
This paper describes the development and evolution of the critical architecture for a laser-produced-plasma (LPP) extreme-ultraviolet (EUV) source for advanced lithography applications in high volume manufacturing (HVM). In this paper we discuss the most recent results from high power sources in the field and testing on our laboratory based development systems, and describe the requirements and technical challenges related to successful implementation of those technologies on production sources. System performance is shown, focusing on pre-pulse operation with high conversion efficiency (CE) and with dose control to ensure high die yield. Finally, experimental results evaluating technologies for generating stable EUV power output for a high volume manufacturing (HVM) LPP source will be reviewed.
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- 2015
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13. Performance overview and outlook of EUV lithography systems
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Christian Wagner, Jo Finders, Milos Popadic, Sjoerd Lok, Koen de Peuter, Arthur Winfried Eduardus Minnaert, Rudy Peeters, Nigel R. Farrar, Chris de Ruijter, Roderik van Es, Alexander Schafgans, Daniel J. W. Brown, Ron Kool, Noreen Harned, Herman Boom, Eelco van Setten, Jörg Mallmann, Martin Lin, Martijn van Noordenburg, Daniel Smith, Frank Y. S. Chuang, Alberto Pirati, Roger Huang, Marcel Beckers, Judon Stoeldraijer, David C. Brandt, Carmen Zoldesi, and Hans Meiling
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Optics ,business.industry ,Computer science ,Extreme ultraviolet lithography ,Factory (object-oriented programming) ,Wafer ,business ,Lithography ,Numerical aperture - Abstract
Multiple NXE:3300 are operational at customer sites. These systems, equipped with a Numerical Aperture (NA) of 0.33, are being used by semiconductor manufacturers to support device development. Full Wafer Critical Dimension Uniformity (CDU) of 1.0 nm for 16nm dense lines and 1.1 nm for 20nm isolated space and stable matched overlay performance with ArF immersion scanner of less than 4nm provide the required lithographic performance for these device development activities. Steady progresses in source power have been achieved in the last 12 months, with 100Watts (W) EUV power capability demonstrated on multiple machines. Power levels up to 90W have been achieved on a customer machine, while 110W capability has been demonstrated in the ASML factory. Most NXE:3300 installed at customers have demonstrated the capability to expose 500 wafers per day, and one field system upgraded to the 80W configuration has proven capable of exposing 1,000 wafers per day. Scanner defectivity keeps being reduced by a 10x factor each year, while the first exposures obtained with full size EUV pellicles show no appreciable difference in CDU when compared to exposures done without pellicle. The 4th generation EUV system, the NXE: 3350, is being qualified in the ASML factory.
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- 2015
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14. Advances in copper laser technology: kinetic enhancement
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Daniel J. W. Brown, Michael J. Withford, James A. Piper, Graham D. Marshall, Robert Carman, and Richard P. Mildren
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Active laser medium ,Materials science ,business.industry ,chemistry.chemical_element ,Nonlinear optics ,Mature technology ,Statistical and Nonlinear Physics ,Laser ,medicine.disease_cause ,Copper ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,law.invention ,Optics ,chemistry ,law ,medicine ,Optoelectronics ,Laser beam quality ,Electrical and Electronic Engineering ,business ,Ternary operation ,Ultraviolet - Abstract
Since their invention in 1966 copper vapour lasers (CVLs) have developed into a mature technology with applications including high-speed imaging, micro-machining, non-linear frequency conversion to the ultraviolet, and pumping of solid-state laser materials. However, the performance characteristics of conventional CVLs are fundamentally limited by kinetic processes at play within the gain medium and hence, these devices largely failed to keep pace with advances in visible solid state lasers during the late 1980s and early 1990s. In 1996 a new subclass of CVL, termed a kinetically enhanced or KE-CVL, was developed that used a ternary gas mixture (HCl–H2–Ne) to tailor the kinetic processes that limit laser performance. These devices offer dramatic improvements in power (both average and high beam quality) and repetition rate scalability. Indeed, 100 W of visible, high beam quality power is now readily available from relatively small copper laser systems. In this paper the underlying principles and performance characteristics of KE-CVLs will be reviewed.
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- 2004
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15. Laser produced plasma light source development for HVM
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Nigel R. Farrar, David C. Brandt, Rudy Peeters, David W. Myers, Daniel J. W. Brown, Robert J. Rafac, Norbert R. Bowering, Robert Kazinczi, Daniel Smith, Noreen Harned, Silvia De Dea, Daniel J. Riggs, Bruno La Fontaine, Igor V. Fomenkov, Michael Purvis, Alex I. Ershov, Hans Meiling, and Alberto Pirati
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business.industry ,law ,Computer science ,Extreme ultraviolet ,Extreme ultraviolet lithography ,Multiple patterning ,Optoelectronics ,Plasma ,business ,Laser ,Lithography ,Engineering physics ,law.invention - Abstract
This paper describes the development of a laser-produced-plasma (LPP) extreme-ultraviolet (EUV) source for advanced lithography applications in high volume manufacturing. EUV lithography is expected to succeed 193nm immersion double patterning technology for sub- 20nm critical layer patterning. In this paper we discuss the most recent results from high power testing on our development systems targeted at the 250W configuration, and describe the requirements and technical challenges related to successful implementation of these technologies. Subsystem performance will be shown including Conversion Efficiency (CE), dose control, collector protection and out-of-band (OOB) radiation measurements. This presentation reviews the experimental results obtained on systems with a focus on the topics most critical for a 250W HVM LPP source.
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- 2014
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16. LPP EUV source readiness for NXE 3300B
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Rudy Peeters, Silvia De Dea, David C. Brandt, Robert J. Rafac, Daniel J. W. Brown, Daniel J. Riggs, Norbert R. Bowering, Alex I. Ershov, Hans Meiling, Robert Kazinczi, Alberto Pirati, David W. Myers, Noreen Harned, Daniel Smith, Igor V. Fomenkov, Bruno La Fontaine, and Nigel R. Farrar
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Scanner ,business.industry ,Extreme ultraviolet lithography ,Laser ,Performance results ,High volume manufacturing ,Automotive engineering ,law.invention ,Power (physics) ,Optics ,law ,Extreme ultraviolet ,Environmental science ,Cost of ownership ,business - Abstract
Laser produced plasma (LPP) light sources have been developed as the primary approach for EUV scanner imaging of circuit features in sub-20nm devices in high volume manufacturing (HVM). This paper provides a review of development progress and readiness status for the LPP extreme-ultra-violet (EUV) source. We present the latest performance results from second generation sources, including Prepulse operation for high power, collector protection for long lifetime and low cost of ownership, and dose stability for high yield. Increased EUV power is provided by a more powerful drive laser and the use of Prepulse operation for higher conversion efficiciency. Advanced automation and controls have been developed to provide the power and energy stability performance required during production fab operation. We will also discuss lifetesting of the collector in Prepulse mode and show the ability of the debris mitigation systems to keep the collector multi-layer coating free from damage and maintain high reflectivity.
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- 2014
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17. High-power, high-brightness master-oscillator power-amplifier copper laser system based on kinetically enhanced active elements
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James A. Piper, Daniel J. W. Brown, and Michael J. Withford
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Brightness ,Materials science ,business.industry ,Amplifier ,chemistry.chemical_element ,Near and far field ,Condensed Matter Physics ,Laser ,Kinetic energy ,Copper ,Atomic and Molecular Physics, and Optics ,law.invention ,Power (physics) ,Master oscillator ,Optics ,chemistry ,law ,Electrical and Electronic Engineering ,business - Abstract
We report the performance characteristics of a copper laser master-oscillator power-amplifier system incorporating kinetically enhanced active elements. The advantages provided by kinetic enhancement lead to record brightness levels.
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- 2001
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18. Modeling the plasma kinetics in a kinetically enhanced copper vapor laser utilizing HCl+H/sub 2/ admixtures
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James A. Piper, Michael J. Withford, Richard P. Mildren, Daniel J. W. Brown, and Robert Carman
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Free electron model ,Copper vapor laser ,Electron density ,Materials science ,Buffer gas ,Analytical chemistry ,Plasma ,Condensed Matter Physics ,Laser ,Atomic and Molecular Physics, and Optics ,law.invention ,law ,Excited state ,Electrical and Electronic Engineering ,Atomic physics ,Lasing threshold - Abstract
A detailed computer model has been used to simulate the plasma kinetics and lasing characteristics in a kinetically enhanced copper vapor laser (KE-CVL) which utilizes Ne-H/sub 2/-HCl buffer gas mixtures. The model reproduces key features of the observed operating characteristics of the KE-CVL-in particular, relating to the electrical characteristics of the plasma tube, time evolution of Cu 4s/sup 2/S/sub 1/2/ ground state density, and formation of the laser output. It is shown that the principal role of the HCl additive is to increase the electron loss rate during the interpulse period via dissociative attachment reactions between free electrons and vibrationally excited HCl (/spl nu/=1,2) molecules. This leads to a reduction of the prepulse electron density establishing more favorable prepulse conditions for laser action during the subsequent excitation phase. In the KE-CVL, the plasma skin effect governing the development of the radial electric field is greatly reduced compared to conventional CVL's, altering the spatio-temporal evolution of the optical gain and laser field intensities to substantially enhance high-beam-quality output. Comparisons between model results and experimental data for the decay rate of the Cu 4s/sup 2/ /sup 2/D/sub 3/2/ metastable lower laser level in the early afterglow suggest that there may be an additional de-excitation mechanism for the /sup 2/D/sub 3/2,5/2/ levels in the KE-CVL plasma which has yet to be identified.
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- 2000
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19. A 60-W high-beam-quality single-oscillator copper vapor laser
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Daniel J. W. Brown and Michael J. Withford
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Copper vapor laser ,Pulse repetition frequency ,Materials science ,Hydrogen ,business.industry ,Buffer gas ,chemistry.chemical_element ,Condensed Matter Physics ,Laser ,Copper ,Atomic and Molecular Physics, and Optics ,law.invention ,Neon ,Optics ,chemistry ,law ,Optoelectronics ,Laser beam quality ,Electrical and Electronic Engineering ,business - Abstract
We report dramatic improvements (up to four times) in the generation of high-beam-quality (HBQ) output power from copper vapor lasers (CVLs) by using tailored HCl-H/sub 2/-Ne buffer gas mixtures. Up to 60 W of HBQ power was obtained from a 38-mm bore-diameter CVL at a pulse repetition frequency of 12 kHz and 50 W at 22 kHz. This improvement in power capability is attributable to the modification of the spatio-temporal gain characteristics of the laser when using the new buffer gas mixture.
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- 1999
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20. Enhanced polymer ablation rates using high-repetition-rate ultraviolet lasers
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Elizabeth K. Illy, Michael J. Withford, Daniel J. W. Brown, and James A. Piper
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Pulse repetition frequency ,Materials science ,Laser ablation ,Pulse (signal processing) ,business.industry ,Laser beam machining ,Laser ,Q-switching ,Atomic and Molecular Physics, and Optics ,law.invention ,X-ray laser ,Optics ,law ,Ultrafast laser spectroscopy ,otorhinolaryngologic diseases ,sense organs ,Electrical and Electronic Engineering ,business - Abstract
Etch rates (/spl mu/m/pulse) for glycol-modified polyethylene terephthalate (PETG) under pulsed UV (255 nm) laser processing are measured as a function of pulse repetition frequency in the range 0.7-15 kHz. Materials removal rates (/spl mu/m/s) scale approximately linearly with pulse repetition frequency at a fluence of 0.59 J/cm/sup 2/, and there appears to be no attenuation of the ablating laser beam by the ejected material plume for pulse rates up to 15 kHz. The instantaneous etch rate for pulses in a sequence increases markedly (/spl sim/40%) for long pulse sequences (>100 pulses) at high PRF (15 kHz), an effect which can be used to increase machining rates while operating at a moderate laser fluence.
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- 1999
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21. Influence of the pre-pulse plasma electron density on the performance of elemental copper vapour lasers
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James A. Piper, Michael J. Withford, Robert Carman, and Daniel J. W. Brown
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Pulse repetition frequency ,Electron density ,Materials science ,Buffer gas ,chemistry.chemical_element ,Plasma ,Laser ,Copper ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,law.invention ,Afterglow ,chemistry ,law ,Electrical and Electronic Engineering ,Physical and Theoretical Chemistry ,Atomic physics ,Lasing threshold - Abstract
A detailed computer model for the kinetics in an elemental copper vapour laser (Cu–Ne–H 2 ) has been used to investigate the importance of the pre-pulse electron density on the performance and lasing characteristics of such a device. The results show that the laser output power and operating efficiency are increased by 65% and 100%, respectively, at a pulse repetition frequency of 17 kHz, if the pre-pulse electron density is reduced by a factor of 5–10. Modelling of the plasma kinetics during the afterglow period suggests that such a reduction is brought about when trace quantities (∼0.3%) of HCl are introduced into the plasma to increase the electron density decay rates via dissociative attachment reactions. The predicted improvements in laser performance which occur as a result of a reduced pre-pulse electron density are consistent with the observed operating characteristics of Kinetically Enhanced copper vapour lasers which use HCl–H 2 –Ne buffer gas mixtures.
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- 1998
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22. N-body simulations using customized potential-density pair basis sets
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John C. B. Papaloizou and M. J. W. Brown
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Set (abstract data type) ,Physics ,Class (set theory) ,Code (set theory) ,Classical mechanics ,Basis (linear algebra) ,Space and Planetary Science ,Stellar dynamics ,Potential density ,Astronomy and Astrophysics ,Construct (python library) ,Algorithm ,Basis set - Abstract
Potential–density pair basis sets can be used for highly efficient N-body simulation codes, but they suffer from a lack of versatility, i.e. a basis set has to be constructed for each different class of stellar system. We present numerical techniques for generating a biorthonormal potential–density pair basis set that has a general specified pair as its lowest-order member. We go on to demonstrate how the set can be used to construct N-body equilibria, which we then evolve using an N-body code that calculates forces using the basis set.
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- 1998
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23. A 100 W, near diffraction limited, copper HyBrID laser oscillator
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Richard P. Mildren, Daniel J. W. Brown, and David R Jones
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Diffraction ,Pulse repetition frequency ,Acoustics and Ultrasonics ,business.industry ,Chemistry ,chemistry.chemical_element ,Condensed Matter Physics ,Laser ,Copper ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials ,law.invention ,Optics ,law ,Pulse compression ,Optical cavity ,Laser beam quality ,business ,Excitation - Abstract
We report on the operation of a 6 cm bore copper HyBrID laser which incorporates a high-magnification (M = 280) negative-branch confocal optical resonator and utilizes a magnetic pulse compression excitation circuit. 125 W total output was obtained at a pulse repetition frequency of 12.5 kHz, of which 101 W (i.e. 80% of the total) was high beam quality output. `Power in the bucket' measurements revealed that of the high beam quality output was within the diffraction limit (62 rad), and within the diffraction limit.
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- 1998
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24. Kinetically enhanced copper vapour lasers employing H2–HCl–Ne buffer gas mixtures
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Michael J. Withford, James A. Piper, Robert Carman, and Daniel J. W. Brown
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Materials science ,business.industry ,Buffer gas ,Analytical chemistry ,chemistry.chemical_element ,Plasma ,Partial pressure ,Laser ,Copper ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,law.invention ,Neon ,Optics ,chemistry ,Volume (thermodynamics) ,law ,Electrical and Electronic Engineering ,Physical and Theoretical Chemistry ,business - Abstract
The output powers from 25 mm (volume 0.49 l) and 40 mm (volume 1.9 l) diameter copper vapour lasers (nominally 20 and 55 W devices) are approximately doubled to >50 and >100 W respectively by adding small partial pressures of both H2 and HCl to the neon buffer gas. Our studies show that this gas mixture performs better than a H2–HBr admix, a result we attribute to more efficient reassociation of HCl in the plasma region.
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- 1998
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25. Afterglow ground-state copper density behavior in kinetically enhanced copper vapor lasers
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Michael J. Withford, Richard P. Mildren, Robert Carman, Daniel J. W. Brown, and James A. Piper
- Subjects
Copper vapor laser ,Materials science ,chemistry.chemical_element ,Plasma ,Condensed Matter Physics ,Laser ,Copper ,Atomic and Molecular Physics, and Optics ,Afterglow ,law.invention ,Neon ,chemistry ,law ,Laser power scaling ,Electrical and Electronic Engineering ,Atomic physics ,Spectroscopy - Abstract
The interferometric "Hook" method has been used to measure the copper ground-state density during the interpulse period for a 38 mm bore diameter copper vapor laser (CVL) operated in kinetically enhanced (KE) mode (Ne-HCl-H/sub 2/ gas mixture) and in conventional mode (pure neon and Ne-H/sub 2/ gas mixtures). It was found that the rate of regrowth of the axial copper density during the afterglow of the KE-CVL is 3-4 times faster, and the axial prepulse ground-state copper density is 2-3 times higher, than that observed for pure Ne or Ne-HI buffer gases. We conclude that the primary action of the HCl+H/sub 2/ additives is to increase the interpulse plasma relaxation rate and to increase the threshold copper density beyond which thermal runaway occurs. These effects are primarily responsible for the elevated pulse rates and increased pulse energies giving improved power scaling characteristics of KE-CVLs.
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- 1998
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26. The synthesis of 1-amino-2-hydroxy- and 2-amino-1-hydroxy-substituted ethylene-1,1-bisphosphonic acids and their N-methylated derivatives
- Author
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Stephen P. Swetnam, S. A. Cumming, Jonathan M. Hughes, J. C. Caesar, J. W. Brown, D. V. Griffiths, and J. D. Kelly
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Ethylene ,Formic acid ,Organic Chemistry ,Formaldehyde ,Biochemistry ,Catalysis ,chemistry.chemical_compound ,chemistry ,Hydrogenolysis ,Drug Discovery ,Organic chemistry ,Phosphorus trichloride ,Phosphorous acid ,Protecting group - Abstract
A synthesis of 2-amino-1-hydroxyethylene-1,1-bisphosphonic acid 3 has been developed from N -phthaloylglycine via dimethyl 2-( N -phthaloylamino)acetylphosphonate 1 . The preparation of the N -methylated and N , N -dimethylated derivatives 4 and 5 has been achieved by the reaction of 3 with formic acid and formaldehyde. The synthesis of 1-amino-2-hydroxyethylene-1,1-bisphosphonic acid 9 (RR′H) and its N -methylated and N , N -dimethylated analogues has been achieved by the reaction of phosphorus trichloride and phosphorous acid with the appropriate O -benzyl protected hydroxyacetamide, followed by catalytic hydrogenolysis of the protecting group.
- Published
- 1997
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27. Role of passenger leukocytes in allograft rejection: effect of depletion of donor alveolar macrophages on the local production of TNF-alpha, T helper 1/T helper 2 cytokines, IgG subclasses, and pathology in a rat model of lung transplantation
- Author
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Y Sekine, L K Bowen, K M Heidler, N Van Rooijen, J W Brown, O W Cummings, and D S Wilkes
- Subjects
Immunology ,Immunology and Allergy - Abstract
Acute lung allograft rejection is believed to be initiated by passenger leukocytes, such as alveolar macrophages (AM), in the donor organ, which release TNF-alpha, and present alloantigens to host lymphocytes, to up-regulated Th1 cellular and humoral immunity. However, the role of donor AM in local TNF-alpha synthesis, and their ability to induce local Th1 cellular and humoral immunity have not been evaluated. By depleting Brown Norway (BN, RT1n) rat lung allografts of AM before transplantation into Lewis rat (LEW, RT1(1)) recipients, the current study determined the role of donor AM in including the production of TNF-alpha, IFN-gamma (Th1 cytokine), IL-4 (Th2 cytokine), IgG subtypes, and rejection pathology in the allograft. The data show that compared with untreated BN allografts, pretransplant depletion of donor lung AM resulted in significantly less TNF-alpha, and IFN-gamma production in allograft bronchoalveolar lavage fluid with variable effects on local IL-4 production. Depletion of AM in the donor lung before transplantation affected the local production of several IgG subclasses. However, pretransplant depletion of donor AM had no effect on the development of the pathology of severe acute rejection. These data show that donor AM have a central role in the local synthesis of TNF-alpha and induce the production of IFN-gamma and IgG subtypes, locally, during acute lung allograft rejection. However, depletion of AM before transplantation does not prevent the development of severe acute rejection in BN rat lungs, transplanted into LEW recipients.
- Published
- 1997
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28. Ground-state depletion mechanisms in pulsed barium vapor lasers
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Richard P. Mildren, Daniel J. W. Brown, and James A. Piper
- Subjects
education.field_of_study ,Chemistry ,Ambipolar diffusion ,Population ,General Physics and Astronomy ,chemistry.chemical_element ,Barium ,Population inversion ,Laser ,Afterglow ,law.invention ,law ,Ionization ,Physics::Atomic Physics ,Diffusion (business) ,Atomic physics ,education - Abstract
Depletion of the metal vapor density from the central region of metal vapor laser tubes has recently been identified as an important factor limiting laser output. We have studied the mechanisms that deplete the ground-state metal density profile by measuring radially resolved population histories of neutral and ionic species during a “burst” (i.e., a pulse train of 20–30 excitation pulses) in a barium vapor laser (BVL). The observed spatiotemporal density behavior during the afterglow of the first shot in the burst agrees well with a simple model for diffusion and recombination, which we have used to show that the primary depletion mechanism during the establishment of steady-state conditions arises from the ambipolar diffusion of ions to the tube wall, and that gas-heating effects are secondary. Analysis of the steady-state (i.e., late-burst) afterglow behavior further reveals that the depletion is significantly greater than that expected from the measured barium ionization, particularly when operating a...
- Published
- 1997
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29. Limiting factors in PRF scaling of barium vapour lasers
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James A. Piper, Daniel J. W. Brown, and Richard P. Mildren
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Pulse repetition frequency ,Electron density ,Materials science ,business.industry ,chemistry.chemical_element ,Barium ,Electron ,Laser ,digestive system diseases ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,law.invention ,Ion ,Metal ,Optics ,chemistry ,law ,visual_art ,visual_art.visual_art_medium ,Electrical and Electronic Engineering ,Physical and Theoretical Chemistry ,business ,Scaling - Abstract
We have studied the factors limiting the performance of a barium vapour laser (BVL) as the pulse repetition frequency (PRF) is elevated. By measuring the population densities of key barium species, we have found that increasing the PRF leads to progressively larger depletion of the axial pre-pulse Ba ground-state density (up to 85% at 15 kHz PRF), due to the combined effects of ion pumping and gas heating. A direct consequence of this Ba density depletion is a proportional decrease in the peak upper laser-level density of the 1.50 μm and 1.13 μm laser transitions (i.e. Ba 1 P 1 ) during the excitation pulse. The results suggest that ground-state depletion is the dominant factor limiting laser output at high PRFs, and that the effects of the pre-pulse lower laser-level and electron densities play a secondary role. The implications to the PRF scaling of BVLs and other metal vapour lasers are discussed.
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- 1997
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30. Mode beating effects in metal vapour lasers
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James A. Piper, R.M. Hentschel, and Daniel J. W. Brown
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Materials science ,business.industry ,Mode (statistics) ,Laser ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,law.invention ,Amplitude modulation ,Metal ,Metal vapour laser ,Optics ,law ,visual_art ,visual_art.visual_art_medium ,Electrical and Electronic Engineering ,Physical and Theoretical Chemistry ,Atomic physics ,business - Abstract
Observations of amplitude modulation in laser pulses emitted by a discharge-excited Sr + recombination laser are presented. The mechanism of mode-beating is proposed to account for such behaviour. Comparisons are made with previous reports of similar behaviour in a number of metal vapour laser systems, and suggestions that this phenomenon is the result of self mode-locking are examined.
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- 1997
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31. High-beam quality, high-power copper HyBrID laser injection-seeded oscillator system
- Author
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D.R. Jones, C.G Whyte, C.E. Little, and Daniel J. W. Brown
- Subjects
Materials science ,Copper vapour laser ,business.industry ,chemistry.chemical_element ,Laser ,Copper ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Power (physics) ,law.invention ,Optics ,chemistry ,law ,Seeding ,Laser beam quality ,Electrical and Electronic Engineering ,Physical and Theoretical Chemistry ,Oscillator system ,Divergence (statistics) ,business - Abstract
We report an injection-seeded oscillator system based on Cu HyBrID laser active elements producing 120 W of output power with pulse-average divergence
- Published
- 1997
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32. Investigation of the effects of bromine and hydrogen bromide additives on copper vapour laser performance
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Robert Carman, Michael J. Withford, Daniel J. W. Brown, and James A. Piper
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Materials science ,Bromine ,Hydrogen ,business.industry ,Hydrogen bromide ,Analytical chemistry ,chemistry.chemical_element ,Pulse duration ,Laser ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,law.invention ,Volumetric flow rate ,chemistry.chemical_compound ,Optics ,chemistry ,law ,Laser beam quality ,Electrical and Electronic Engineering ,Physical and Theoretical Chemistry ,business ,Lasing threshold - Abstract
We report on a detailed study of the effects of bromine and hydrogen bromide buffer-gas additive on the electrical and lasing characteristics of a conventional, high-temperature copper vapour laser. At standard buffer gas flow rates HBrNe mixtures produced relatively small improvements in output power, however, larger increases in output power were observed at elevated HBrNe flow rates. Added HBr also significantly modifies the spatio-temporal characteristics of laser output, increasing the pulse duration by a factor of 2 while also improving the radial intensity profile. This result has important implications for improving the extraction of high beam quality output from devices employing high magnification unstable resonators.
- Published
- 1997
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- View/download PDF
33. Evolution of excited and ground-state species during burst-mode excitation of a barium vapor laser
- Author
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James A. Piper, Daniel J. W. Brown, and Richard P. Mildren
- Subjects
Electron density ,Materials science ,Ambipolar diffusion ,Buffer gas ,chemistry.chemical_element ,Condensed Matter Physics ,Laser ,Atomic and Molecular Physics, and Optics ,law.invention ,Neon ,chemistry ,law ,Ionization ,Excited state ,Electrical and Electronic Engineering ,Atomic physics ,Helium - Abstract
We have studied the development of steady-state prepulse conditions in the barium vapor laser (BVL) and the factors that influence steady-state laser output using the "hook" method. The ground-state and excited-state Ba and Ba/sup +/ species were measured during the afterglow, and the Ba/sup 1/P/sub 1/ upper laser level during the excitation phase, of selected pulses in a burst of excitation pulses at 8 kHz. Results show that large depletion of the prepulse Ba/sup 1/S/sub 0/ ground-state density from the axial region of the tube occurs during the burst, and proportional decreases in the peak upper-laser-level density occur during the excitation phase. The prepulse electron density (inferred from the total Ba/sup +/ density) and lower-laser-level densities do not accumulate during the burst, and it is concluded that ground-state depletion is primarily responsible for the decrease in laser pulse energy that occurs during a burst as reported by Pask and Piper (1994). We observe significantly greater depletion of the ground-state density on-axis in the presence of neon buffer gas than helium, which we attribute primarily to the high ionization observed in neon and the corresponding increase in the effects of ambipolar diffusion. The results highlight the influence of buffer-gas composition on the establishment of steady-state prepulse conditions (and therefore the steady-state laser pulse characteristics). The results have implications to metal vapor lasers in general, including those operating with buffer-gas additives.
- Published
- 1997
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- View/download PDF
34. Prevalence and predictors of adult hypertension in Kabul, Afghanistan
- Author
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Nick J W Brown, Khwaja Mir Islam Saeed, and Mohammad Hafez Rasooly
- Subjects
Gerontology ,Adult ,Male ,medicine.medical_specialty ,Cross-sectional study ,Population ,Body Mass Index ,Risk Factors ,Epidemiology ,medicine ,Diabetes Mellitus ,Odds Ratio ,Prevalence ,Humans ,Urban ,Family ,Obesity ,Family history ,education ,Aged ,education.field_of_study ,business.industry ,Public health ,Associated factors ,Public Health, Environmental and Occupational Health ,Afghanistan ,Age Factors ,Odds ratio ,Feeding Behavior ,Middle Aged ,medicine.disease ,Diet ,Cross-Sectional Studies ,Obesity, Abdominal ,Hypertension ,Blood pressure ,Educational Status ,Female ,business ,Body mass index ,Demography ,Research Article - Abstract
Background The prevalence of hypertension is rising worldwide with an estimated one billion people now affected globally and is of near epidemic proportions in many parts of South Asia. Recent turmoil has until recently precluded estimates in Afghanistan so we sought, therefore, to establish both prevalence predictors in our population. Methods We conducted a cross-sectional study of adults ≥40 years of age in Kabul from December 2011-March 2012 using a multistage sampling method. Additional data on socioeconomic and lifestyle factors were collected as well as an estimate of glycaemic control. Bivariate and multivariable analyses were undertaken to explore the association between hypertension and potential predictors. Results A total of 1183 adults (men 396, women 787) of ≥ 40years of age were assessed. The prevalence of hypertension was 46.2% (95% CI 43.5 – 49.3). Independent predictors of hypertension were found to be: age ≥50 (OR = 3.86, 95% CI: 2.86 – 5.21); illiteracy (OR = 1.90, 1.05 – 1.90); the consumption of rice >3 times per week (OR = 1.43, 1.07 – 1.91); family history of diabetes (OR = 2.20, 1.30 – 3.75); central obesity (OR = 1.67, 1.23 – 2.27); BMI ≥ 30 Kg/meter squared (OR = 2.08, 1.50 – 2.89). The consumption of chicken and fruit more than three times per week were protective with ORs respectively of 0.73 (0.55-0.97) and 0.64 (0.47 – 0.86). Conclusions Hypertension is a major public health problem in Afghan adults. We have identified a number of predictors which have potential for guiding interventions.
- Published
- 2013
35. CO2/Sn LPP EUV sources for device development and HVM
- Author
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Jonathan Grava, Yezheng Tao, Bruno La Fontaine, Daniel J. W. Brown, Robert A. Bergstedt, Chirag Rajyaguru, Nigel R. Farrar, Kevin Zhang, Robert N. Jacques, Alex I. Ershov, Norbert R. Bowering, Silvia De Dea, Toshi Ishihara, Georgiy O. Vaschenko, David W. Myers, David R. Evans, Christopher J. Wittak, David C. Brandt, Imtiaz Ahmad, Alexander Schafgans, Richard L. Sandstrom, Vladimir B. Fleurov, Palash P. Das, Igor V. Fomenkov, Robert J. Rafac, Shailendra N. Srivastava, Peter I. Porshnev, Spencer Rich, Peter Baumgart, Rod D. Simmons, Tedsuja Ishikawa, Wayne J. Dunstan, and Kay Hoffmann
- Subjects
business.industry ,Computer science ,Extreme ultraviolet lithography ,Amplifier ,Electrical engineering ,Plasma ,Laser ,Power (physics) ,law.invention ,Electricity generation ,Reliability (semiconductor) ,Optics ,Semiconductor ,law ,Extreme ultraviolet ,business ,Nominal power (photovoltaic) - Abstract
Laser produced plasma (LPP) systems have been developed as the primary approach for use in EUV scanner light sources for optical imaging of circuit features at 20nm nodes and beyond. This paper provides a review of development progress and productization status for LPP extreme-ultra-violet (EUV) sources with performance goals targeted to meet specific requirements from ASML. We present the latest results on power generation and collector protection for sources in the field operating at 10W nominal power and in San Diego operating in MOPA (Master Oscillator Power Amplifier) Prepulse mode at higher powers. Semiconductor industry standards for reliability and source availability data are provided. In these proceedings we show results demonstrating validation of MOPA Prepulse operation at high dose-controlled power: 40 W average power with closed-loop active dose control meeting the requirement for dose stability, 55 W average power with closed-loop active dose control, and early collector protection tests to 4 billion pulses without loss of reflectivity.
- Published
- 2013
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- View/download PDF
36. Laser produced plasma EUV light source for EUVL patterning at 20nm node and beyond
- Author
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Nigel R. Farrar, Igor V. Fomenkov, Alex I. Ershov, Norbert R. Bowering, Bruno La Fontaine, Daniel J. W. Brown, David W. Myers, and David C. Brandt
- Subjects
Computer science ,business.industry ,Extreme ultraviolet lithography ,Plasma ,Laser ,law.invention ,Metrology ,law ,Extreme ultraviolet ,Multiple patterning ,Optoelectronics ,Node (circuits) ,business ,Lithography - Abstract
This paper describes the development of a laser-produced-plasma (LPP) extreme-ultraviolet (EUV) source for advanced lithography applications in high volume manufacturing. EUV lithography is expected to succeed 193nm immersion double patterning technology for sub-20nm critical layer patterning. In this paper we discuss the most recent results from high power testing on our development systems in San Diego, and describe the requirements and technical challenges related to successful implementation of these technologies. Subsystem performance will be shown including the CO2 drive laser, droplet generation, laser-to-droplet targeting control, intermediate-focus (IF) metrology, out-of-band (OOB) radiation measurements and system use and experience. In addition, a multitude of smaller lab-scale experimental systems have also been constructed and tested..
- Published
- 2013
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- View/download PDF
37. High power EUV LPP
- Author
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David W. Myers, Richard L. Sandstrom, Alex I. Ershov, Tao Yezheng, Daniel J. Riggs, Robert A. Bergstedt, Wayne J. Dunstan, Alexander Schafgans, Daniel J. W. Brown, Georgiy O. Vaschenko, Robert J. Rafac, Palash P. Das, and Igor V. Fomenkov
- Subjects
Optics ,Materials science ,business.industry ,law ,Extreme ultraviolet lithography ,Extreme ultraviolet ,Hardware_INTEGRATEDCIRCUITS ,Hardware_PERFORMANCEANDRELIABILITY ,Plasma ,business ,Laser ,Lithography ,law.invention - Abstract
Laser produced plasma (LPP) systems are the leading approach for extreme-ultra-violet (EUV) lithography of circuit features at sub-20nm nodes. This paper reviews technology and development progress for high-power sources optimized for EUV lithography. Article not available.
- Published
- 2013
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38. Efficacité des ennemis naturels deLantana camara à Guam : évaluation locale et saisonnière
- Author
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P. Singh, U. Prasad, R. Muniappan, G. R. W. Denton, J. W. Brown, and T. S. Lali
- Subjects
Animal ecology ,Insect Science ,Verbenaceae ,Lantana camara ,Lantana ,Forestry ,Plant Science ,Natural enemies ,Biology ,General Agricultural and Biological Sciences ,biology.organism_classification ,Agronomy and Crop Science ,Ecology, Evolution, Behavior and Systematics - Abstract
Dans un effort continu pour eradiquer ou au moins, reduire, la presence deLantana camara L., advantice bien repandue a Guam, un suivi bi-mensuel a ete effectue, sur une periode de 4 ans et demi, pour etudier l’efficacite des ennemis naturels a affaiblir la plante et a diminuer le nombre de graines viables. Au total, huit agents de lutte biologique ont ete recenses. Les insectes s’attaquant aux feuilles sont :Uroplata girardi Pic. (Col. : Chrysomelidae),Teleonemia scrupulosa Stal (Hem. : Tingidae),Calycomyza lantanae Frick (Dip. : Agromyzidae) etHypena strigata (F.) (Lep. : Noctuidae). Les papillons de nuitLantanophaga pusillidactyla (Walker, (Lep. : Pterophoridae),Epinotia lantana (Busck) (Lep. : Tortricidae) etAdoxopheyes melia Clarke (Lep. : Tortricidae) s’attaquent aux fleurs ainsi queT. scrupulosa. E. lantana etOphomyia lantanae (Froggatt) (Dip. : Agromyzidae) font des degâts aux fruits. Un modele empirique de lutte biologique a ete etabli a partir des donnees observees. Le modele a mis en evidence que les 8 auxiliaires empechent la production ou detruisent 225,9 baies par metre carre sur une periode d’observation de deux semaines. Sur cette meme periode, la production de fruits non abimes observee au metre carre n’est que de 96,1. Ainsi, les auxiliaires reduisent la production potentielle de fruits de 70,1 %. Le modele a aussi permis d’estimer le role tenu par chaque auxiliaire dans la lutte biologique globale contreL. camara a Guam
- Published
- 1996
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39. Investigation of the evolution of trace impurities from a newly constructed copper vapour laser
- Author
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Daniel J. W. Brown, James A. Piper, and Michael J. Withford
- Subjects
Copper vapour laser ,Acoustics and Ultrasonics ,Impurity ,Chemistry ,Alumina ceramic ,Analytical chemistry ,Molecule ,Plasma ,Condensed Matter Physics ,Dissociation (chemistry) ,Surfaces, Coatings and Films ,Electronic, Optical and Magnetic Materials - Abstract
We have identified numerous molecular and atomic impurities evolving from the alumina ceramics used in the construction of copper vapour laser (CVL) plasma tubes during the high temperatures associated with typical operating conditions. The majority of these molecular impurities fragments under discharge conditions, with most of the by-products of dissociation contributing to the formation of solid deposits within the plasma tube while hydrogen-bearing molecules produce free or H which can improve CVL output power. Implications for plasma tube design and processing are discussed.
- Published
- 1996
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40. Optimization of H/sub 2/-Ne buffer gas mixtures for copper vapor lasers
- Author
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James A. Piper, Daniel J. W. Brown, and Michael J. Withford
- Subjects
Materials science ,Hydrogen ,business.industry ,Radiation quality ,Buffer gas ,chemistry.chemical_element ,Condensed Matter Physics ,Laser ,Copper ,Atomic and Molecular Physics, and Optics ,law.invention ,Neon ,Resonator ,Optics ,chemistry ,law ,Metal Vapor Lasers ,Optoelectronics ,Physics::Atomic Physics ,Electrical and Electronic Engineering ,business - Abstract
We present results of a detailed study comparing the effects of H/sub 2/ buffer gas additive on the output power and the spatio-temporal evolution of laser output produced by copper vapor lasers of varying aperture-size. We show that while the optimum H/sub 2/ concentration is relatively insensitive to the laser diameter, it is influenced by the type of resonator employed and the total neon buffer gas pressure.
- Published
- 1996
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41. Increased efficiency of high-beam quality extraction from a copper vapor laser with H/sub 2/-Ne admixtures
- Author
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James A. Piper, David W. Coutts, Daniel J. W. Brown, and Michael J. Withford
- Subjects
Copper vapor laser ,Materials science ,Hydrogen ,business.industry ,Analytical chemistry ,Gain ,chemistry.chemical_element ,Condensed Matter Physics ,Laser ,Copper ,Atomic and Molecular Physics, and Optics ,law.invention ,Optical pumping ,Quality (physics) ,Optics ,chemistry ,law ,Physics::Accelerator Physics ,Physics::Atomic Physics ,Laser beam quality ,Electrical and Electronic Engineering ,business - Abstract
We report results of a detailed study investigating the effects of hydrogen additive on the generation of high-beam quality output from a copper vapor laser. Increases up to 390% were observed for the power extracted in the high-beam quality component of laser output, however, the power of the low beam quality output remained relatively unchanged. We attribute these results to modification of the spatio-temporal characteristics of the laser gain with added H/sub 2/. >
- Published
- 1995
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42. Improved ultraviolet second-harmonic generation at elevated repetition rates from a medium-scale copper-vapor laser
- Author
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Michael J. Withford and Daniel J. W. Brown
- Subjects
Copper vapor laser ,Materials science ,business.industry ,Buffer gas ,Second-harmonic generation ,chemistry.chemical_element ,Laser ,medicine.disease_cause ,Medium scale ,Copper ,Atomic and Molecular Physics, and Optics ,law.invention ,Quality (physics) ,chemistry ,law ,medicine ,Optoelectronics ,Electrical and Electronic Engineering ,business ,Ultraviolet - Abstract
We report significant improvements in ultraviolet (UV) power generation at elevated pulse-repetition frequencies (10/spl ges/kHz) from a frequency-doubled copper-vapor laser (CVL), employing a Ne-H/sub 2/ buffer gas. In particular, UV powers of 1.3 W and 0.6 W at 255 nm (SHG green) were generated at 10 kHz and 20 kHz, respectively, when using H/sub 2/ additive in a medium scale (nominally 20 W) CVL oscillator. These results represent improvements of 6.5/spl times/ and /spl sim/100/spl times/, respectively, over the UV powers obtained for pure neon-buffer gas. The enhanced UV powers are directly related to the improvement in high-beam quality extraction from the CVL due to the beneficial effects of the H/sub 2/ add-gas on CVL gain characteristics. >
- Published
- 1995
- Full Text
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43. Production of high average power UV by second-harmonic and sum-frequency generation from copper-vapor lasers
- Author
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David W. Coutts and Daniel J. W. Brown
- Subjects
Materials science ,Sum-frequency generation ,business.industry ,Energy conversion efficiency ,Physics::Optics ,Second-harmonic generation ,Laser pumping ,Laser ,Atomic and Molecular Physics, and Optics ,law.invention ,Optics ,law ,Harmonic ,Laser beam quality ,Electrical and Electronic Engineering ,business ,Electrical efficiency - Abstract
Progress in high average power UV generation by nonlinear frequency conversion of the output of copper-vapor lasers (CVL's) is reviewed. The specific parameters controlling the efficiency of nonlinear frequency conversion using CVL's are highlighted, with CVL beam quality and matching the optical beam delivery system to the characteristics of the nonlinear crystal being identified as the most significant issues. Recent experimental studies of second harmonic generation (SHG) with single-CVL oscillators and CVL oscillator-amplifier systems show that by careful optimization of the CVL pump laser and beam delivery systems, it is now possible to generate multiwatt average powers in the UV with high optical conversion efficiency (up to 35%) and overall electrical efficiency (approaching 0.1%). >
- Published
- 1995
- Full Text
- View/download PDF
44. Light sources for EUV lithography at the 22-nm node and beyond
- Author
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Igor V. Fomenkov, Daniel J. W. Brown, Michael J. Lercel, David W. Myers, Alexander N. Bykanov, Alex I. Ershov, Bruno La Fontaine, David C. Brandt, and Norbert R. Bowering
- Subjects
Physics ,business.industry ,Extreme ultraviolet lithography ,Laser ,Power (physics) ,law.invention ,Optics ,Optical coating ,Duty cycle ,law ,Extreme ultraviolet ,Optoelectronics ,Node (circuits) ,Laser power scaling ,business - Abstract
Through a number of experimental studies carried out on various experimental test stands we are characterizing the scaling of EUV power and collector lifetime. The current performance of the first generation of EUV sources to support EUV lithography scanners is at 20 W power and 70% availability. CO2 drive laser power of up to 17 kW has been reached, while average EUV power of nearly 50 W was demonstrated on an HVM I source with a laser pre-pulse at our facilities. The burst EUV power on this source was in excess of 90 W at 10% to 20% duty cycle and closer to 60 W at 80% duty cycle since the full set of automated controls has not yet been implemented on this source. Once the automation of the laser-droplet position controls is implemented on our pre-pulse system, the average source power is expected to reach power levels on the order of 100 W. Further scaling of source power through operation at repetition rates higher than 50 kHz was also shown to be possible. Through improved gas management, better coatings and parallel testing of collector samples, we have significantly extended the useful life of the source collector mirrors.
- Published
- 2012
- Full Text
- View/download PDF
45. Laser produced plasma EUV sources for device development and HVM
- Author
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Michael J. Lercel, Chirag Rajyaguru, Richard L. Sandstrom, Bruno La Fontaine, David W. Myers, Kevin Zhang, Toshi Ishihara, Silvia De Dea, Georgiy O. Vaschenko, Norbert R. Bowering, Robert N. Jacques, Jonathan Grava, Alex I. Ershov, Daniel J. W. Brown, Robert A. Bergstedt, Christian J. Wittak, Imtiaz Ahmad, Michael R. Woolston, Alexander N. Bykanov, Vladimir B. Fleurov, David C. Brandt, Peter I. Porshnev, Alexander Schafgans, Shailendra N. Srivastava, Robert J. Rafac, Rod D. Simmons, Wayne J. Dunstan, Palash P. Das, Igor V. Fomenkov, Peter Baumgart, and Yezheng Tao
- Subjects
Scanner ,Materials science ,business.industry ,Extreme ultraviolet lithography ,Sputter deposition ,Laser ,law.invention ,Optics ,Electricity generation ,Reliability (semiconductor) ,law ,Extreme ultraviolet ,Optoelectronics ,business ,Lithography - Abstract
Laser produced plasma (LPP) systems have been developed as the primary approach for the EUV scanner light source for optical imaging of circuit features at sub-22nm and beyond nodes on the ITRS roadmap. This paper provides a review of development progress and productization status for LPP extreme-ultra-violet (EUV) sources with performance goals targeted to meet specific requirements from leading scanner manufacturers. We present the latest results on exposure power generation, collection, and clean transmission of EUV through the intermediate focus. Semiconductor industry standards for reliability and source availability data are provided. We report on measurements taken using a 5sr normal incidence collector on a production system. The lifetime of the collector mirror is a critical parameter in the development of extreme ultra-violet LPP lithography sources. Deposition of target material as well as sputtering or implantation of incident particles can reduce the reflectivity of the mirror coating during exposure. Debris mitigation techniques are used to inhibit damage from occuring, the protection results of these techniques will be shown over multi-100's of hours.
- Published
- 2012
- Full Text
- View/download PDF
46. Supporting the massive scale-up of antiretroviral therapy: the evolution of PEPFAR-supported treatment facilities in South Africa, 2005-2009
- Author
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Thobile Mbengashe, Heidi O'Bra, Jeffrey D. Klausner, Elysia Larson, and J. W. Brown
- Subjects
Program evaluation ,medicine.medical_specialty ,National Health Programs ,International Cooperation ,Developing country ,HIV Infections ,Health Services Accessibility ,South Africa ,Acquired immunodeficiency syndrome (AIDS) ,Environmental health ,medicine ,Humans ,Community Health Services ,Healthcare Disparities ,Government ,business.industry ,lcsh:Public aspects of medicine ,Public health ,Public sector ,Public Health, Environmental and Occupational Health ,Capacity building ,PEPFAR ,lcsh:RA1-1270 ,Private sector ,medicine.disease ,Government Programs ,Anti-Retroviral Agents ,HIV/AIDS ,Health Systems ,Medical emergency ,Health Facility Administration ,business ,Program Evaluation ,Research Article - Abstract
Background South Africa has an estimated 1.5 million persons in need of antiretroviral therapy (ART). In 2004, the South African government began collaborating with the United States President's Emergency Plan for AIDS Relief (PEPFAR) to increase access to ART. We determined how PEPFAR treatment support changed from 2005-2009. Methods In order to describe the change in number and type of PEPFAR-supported ART facilities, we analyzed routinely collected program-monitoring data from 2005-2009. The collected data included the number, type and province of facilities as well as the number of patients receiving ART at each facility. Results The number of PEPFAR-supported facilities providing ART increased from 184 facilities in 2005 to 1,469 facilities in 2009. From 2005-2009 the number of PEPFAR-supported government facilities increased 10.1 fold from 54 to 546 while the number of PEPFAR-supported NGO facilities (including general practitioner and NGO facilities) increased 6.2 fold from 114 to 708. In 2009 the total number of persons treated at PEPFAR-supported NGO facilities was 43,577 versus 501,089 persons at PEPFAR-supported government facilities. Overall, the median number of patients receiving ART per site increased from 81 in 2005 to 136 in 2009. Conclusions To mitigate the gap between those needing and those receiving ART, more facilities were supported. The proportion of government facilities supported and the median number of persons treated at these facilities increased. This shift could potentially be sustainable as government sites reach more individuals and receive government funding. These results demonstrate that PEPFAR was able to support a massive scale-up of ART services in a short period of time.
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- 2012
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47. Effects of H2 buffer gas additive on repetition rate scaling of a copper vapour laser
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James A. Piper, Daniel J. W. Brown, and Michael J. Withford
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Pulse repetition frequency ,Range (particle radiation) ,Materials science ,Repetition (rhetorical device) ,business.industry ,Pulse (signal processing) ,Buffer gas ,chemistry.chemical_element ,Laser ,Copper ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,law.invention ,Neon ,Optics ,chemistry ,law ,Optoelectronics ,Electrical and Electronic Engineering ,business - Abstract
The variations in the output power of a copper vapour laser resulting from H2 additive to neon buffer gas are investigated for a wide range of pulse repetition frequencies (3.2 to 19.7 kHz). Small improvements in laser output power (9%) were observed for ∼2% H2-Ne admixture at low repetition frequency, these improvements becoming progressively larger (up to 250%) as the repetition rate increased. These observations are consistent with added H2 modifying the interpulse kinetics, thereby altering the spatiotemporal evolution of the output pulse. In particular, the observed average output power increases at elevated repetition rates owing to both increased laser pulse energy and increased optimum pulse repetition frequency.
- Published
- 1994
- Full Text
- View/download PDF
48. Investigation of the effects of hydrogen and deuterium on copper vapour laser performance
- Author
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Daniel J. W. Brown, Michael J. Withford, and James A. Piper
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Materials science ,Hydrogen ,Buffer gas ,chemistry.chemical_element ,Partial pressure ,Plasma ,Electron ,Atomic and Molecular Physics, and Optics ,Electronic, Optical and Magnetic Materials ,Neon ,Deuterium ,chemistry ,Electrical and Electronic Engineering ,Physical and Theoretical Chemistry ,Atomic physics ,Current (fluid) - Abstract
We report a detailed study of the effects on copper vapour laser performance of the addition of small partial pressures of gaseous hydrogen, deuterium and other trace gases to the neon buffer gas. Increases in output power by typically 30% are observed for a small-scale (6 W) device and the spatial characteristics of the output beam are significantly altered. Increased power deposition due to improved impedance matching is shown to be a minor effect. Instead, the changes to output power and the voltage/current characteristics during the excitation pulse and the interpulse period are attributed primarily to enhanced plasma cooling by elastic interactions resulting in reduced prepulse electron densities.
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- 1994
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49. A self-consistent model for the discharge kinetics in a high-repetition-rate copper-vapor laser
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Daniel J. W. Brown, James A. Piper, and Robert Carman
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Copper vapor laser ,Materials science ,Buffer gas ,chemistry.chemical_element ,Plasma ,Condensed Matter Physics ,Laser ,Atomic and Molecular Physics, and Optics ,law.invention ,Neon ,chemistry ,Physics::Plasma Physics ,law ,Stimulated emission ,Electrical and Electronic Engineering ,Gas-filled tube ,Atomic physics ,Lasing threshold - Abstract
A self-consistent computer model has been developed to simulate the discharge kinetics and lasing characteristics of a copper-vapor laser (CVL) for typical operating conditions. Using a detailed rate-equation analysis, the model calculates the spatio-temporal evolution of the population densities of 11 atomic and ionic copper levels, four neon levels, and includes 70 collisional and radiative processes, in addition to radial particle transport. The long-term evolution of the plasma is taken into account by integrating the set of coupled rate equations describing the discharge and electrical circuit through multiple excitation-afterglow cycles. A time-dependent two-electron group model, based on a bi-Maxwellian electron energy distribution function, has been used to evaluate the energy partitioning between the copper vapor and the neon-buffer gas. The behavior of the plasma in the cooler end regions of the discharge tube near the electrodes, where the plasma kinetics are dominated by the buffer gas, has also been modeled. Results from the model have been compared to experimental data for a narrow-bore (/spl phi/=1.8 cm) CVL operating under optimum conditions. Close agreement is obtained between the results from the model and experimental data when comparing electrical I-V characteristics of the discharge tube and circuit, and spatio-temporal evolution of the population densities of the laser levels and other excited Cu I and Ne I states, and lasing characteristics. During the period of lasing action, the populations of the laser levels are perturbed by 10-20 percent due to stimulated emission. >
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- 1994
- Full Text
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50. Equitable Distribution of PEPFAR-Supported HIV/AIDS Services in South Africa
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Thurma Goldman, Heidi O'Bra, Yogan Pillay, Elysia Larson, Jeffrey D. Klausner, and J. W. Brown
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Tuberculosis ,Inequality ,media_common.quotation_subject ,Population ,Developing country ,South Africa ,Acquired immunodeficiency syndrome (AIDS) ,Environmental health ,Health care ,medicine ,Humans ,Letters ,Social Change ,education ,Socioeconomic status ,media_common ,Government ,education.field_of_study ,Health Care Rationing ,business.industry ,Public Health, Environmental and Occupational Health ,Health Status Disparities ,medicine.disease ,Health Care Reform ,Multivariate Analysis ,Health Resources ,Regression Analysis ,Health Expenditures ,business ,Models, Econometric - Abstract
We assessed the determinants of health care funding allocations among South Africa's provinces and their effects on health care from 1996 through 2007.We performed multivariate regression of funding allocation data against measures of disease burden and health system infrastructure by province.Disease burden was increasingly negatively correlated with funding allocations and explained less than one quarter of the variation in allocations among provinces. Nearly three quarters of the variation in allocations was explained by preexisting hospital infrastructure and health care workers. The density of private hospitals in the preceding year was associated with greater government allocations (b(private) = 0.12; 95% confidence interval [CI] = 0.08, 0.15), but public hospital density in the preceding year was not (b(public) = 0.05; 95% CI = -0.02, 0.11). Greater allocations were associated with a higher number of doctors (b = 0.54; 95% CI = 0.34, 0.75) but fewer nurses (b = -0.37; 95% CI = -0.72,-0.25) in the same year.Regions with a greater capacity to spend funds received more funding and created more infrastructure than those with greater health needs. Historical infrastructure inequalities may have created an infrastructure-inequality trap, in which the distribution of funds to those with greater "absorptive capacity" exacerbates inequalities.
- Published
- 2011
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