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It is important for the Y 2 O 3 film on the inner walls of RIE chambers to have small particle size and a smooth surface. By using CASP to form Y 2 O 3 films on the inner wall of the chamber in this evaluation, particle generation was decreased by 67% compared with conventional APS.

This paper reports the voltage unbalance compensation performance of a three-phase inverter for a Voltage Unbalance Compensator (VUC) controlled by using the method of symmetrical components for an induction motor. The VUC consists of a three-phase PWM rectifier, a DC-link capacitor, and an inverter. The rectifier is connected to the power grid lines and the inverter is connected to one of the ends of the open-winding induction motor. It supplies compensating voltage and keeps the terminal voltage balanced of the induction motor when the voltage unbalances occur on the power grid. By using the method of symmetrical components, the unbalanced three-phase voltage can be represented by a combination of balanced three-phase voltages. Therefore, the compensation voltage can be easily controlled. We clarified that the voltage performance of the inverter for the VUC by simulation and experiment. The results showed that the proposed VUC suppressed the voltage unbalance., International Power Electronics Conference, IPEC 2022, May 15-19, 2022, Himeji

SOA is the key device for burst-mode upstream transmission of 40 Gb/s access network to extend distance and increase users. We evaluate two conventional SOAs and our QD-SOA in networks, consisting of 20-km Single Mode Fiber (SMF) and splitters (1:8, 1:16 & 1:32). First, their characteristics are reported: 3-dB bandwidth & peak wavelength of Amplified Spontaneous Emission (ASE) spectra, gain, saturation output & input, and Noise Figure (NF). QD-SOA gives the lowest NF of 4.59 dB at –20-dBm input due to its highest Optical Signal to Noise Ratio (OSNR). It also has the fastest response time (70 ps) with less data pattern effect when operating in saturation region. Besides the measurement of Input Power Dynamic Range (IPDR) of 3 SOAs, their performances of single versus two-cascaded SOA transmissions are evaluated by Bit Error Rate (BER) in many combinations of SMF and splitters. In case of inserting 1:8 splitter between two-cascaded SOAs, the performance of 2nd-stage QD-SOA has lower BERs than 2nd-stage conventional SOA due to its higher saturation output and less pattern effect when operating at high input power. Finally, both experimental and computed BERs are plotted versus SOA's input to confirm the OSNR degradation and data pattern effect.

We fabricated a high-speed resonant cavity 4x4 photodetector array, which has two functions for high optical alignment robustness and specific wavelength selection. In the 2-SDM 2-WDM FSO communication, 100-Gbps high data rate was successfully demonstrated.

Characteristics of beam scanning device based on a broadband silicon vertically-curved-waveguide surface optical couplers are evaluated. We then demonstrate free-space transmission of 10-Gbps NRZ-OOK signals in the wide wavelength range from 1530 to 1590 nm.

We developed MCF core-to-core path-switching module using vertically curved silicon couplers. MCFs were directly mounted using passive pre-alignment with transmission camera observation. 32-Gbaud DP-QPSK signal transmission over the switch module was possible without significant penalty.

Pre-compensation of nonlinear signal distortion in a transmission link by optical phase conjugation is enhanced by a Raman-amplified parameter profiled fiber for improved propagation symmetry. Application to 5×12 Gb/s DP 16-QAM signals before a 2×160 km link demonstrates 2.2 dB higher Q2-factor.

During the patient's hospitalization, the physician must record daily observations of the patient and summarize them into a brief document called "discharge summary" when the patient is discharged. Automated generation of discharge summary can greatly relieve the physicians' burden, and has been addressed recently in the research community. Most previous studies of discharge summary generation using the sequence-to-sequence architecture focus on only inpatient notes for input. However, electric health records (EHR) also have rich structured metadata (e.g., hospital, physician, disease, length of stay, etc.) that might be useful. This paper investigates the effectiveness of medical meta-information for summarization tasks. We obtain four types of meta-information from the EHR systems and encode each meta-information into a sequence-to-sequence model. Using Japanese EHRs, meta-information encoded models increased ROUGE-1 by up to 4.45 points and BERTScore by 3.77 points over the vanilla Longformer. Also, we found that the encoded meta-information improves the precisions of its related terms in the outputs. Our results showed the benefit of the use of medical meta-information.