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ATHENA is a European led x-ray observatory due for launch in the early 2030s. The X-ray Integral Field Unit (X-IFU) instrument on ATHENA will have an array of 3168 TES microcalorimeters, 2.5 eV resolution (at 7 keV), 5 arc second angular resolution and a 5 arc minute field of view. As one example, will allow unprecedented views of composition and dynamics of galaxy clusters.

In many superconducting transition-edge sensor (TES) microcalorimeters, the measured electrical noise exceeds theoretical estimates based on a thermal model of a single body thermally connected to a heat bath. Here, we report on noise and complex impedance measurements of a range of designs of TESs made with a Mo/Au bilayer. We have fitted the measured data using a two-body model, where the x-ray absorber and the TES are connected by an internal thermal conductance Gae. We find that the so-called excess noise measured in these devices is consistent with the noise generated from the internal thermal fluctuations between the x-ray absorber and the TES. Our fitted parameters are consistent with the origin of Gae being from the finite thermal conductance of the TES itself. These results suggest that even in these relatively low resistance Mo/Au TESs, the internal thermal conductance of the TES may add significant additional noise and could account for all the measured excess noise. Furthermore, we find that around regions of the superconducting transition with rapidly changing derivative of resistance with respect to temperature, an additional noise mechanism may dominate. These observations may lead to a greater understanding of TES devices and allow the design of TES microcalorimeters with improved performance.

We are developing kilo-pixel arrays of transition-edge sensors (TESs) for the X-ray Integral Field Unit on ESA's (European Space Agency's) Athena observatory. Previous measurements of AC-biased Mo/Au TESs have highlighted a frequency-dependent loss mechanism that results in broader transitions and worse spectral performance compared to the same devices measured under DC (Direct Current) bias. In order to better understand the nature of this loss, we are now studying TES pixels in different geometric configurations. We present measurements on devices of different sizes and with different metal features used for noise mitigation and X-ray absorption. Our results show how the loss mechanism is strongly dependent upon the amount of metal in close proximity to the sensor and can be attributed to induced eddy current coupling to these features. We present a finite element model that successfully reproduces the magnitude and geometry dependence of the losses. Using this model, we present mitigation strategies that should reduce the losses to an acceptable level.

The X-ray integral field unit (X-IFU) for ESA's Athena X-ray observatory will consist of 3840 AC-biased transition edge sensors (TESs), read out using frequency domain multiplexing (FDM). In this paper we describe details of the latest pixels geometries that are being designed for the current baseline array configuration. This includes details on how important TES properties (transition parameters, thermal design of the pixels, absorber composition) are being optimized to meet the target energy resolution, count-rate and quantum efficiency. We also present the latest design optimizations specifically targeted at mitigating AC-bias phenomena in Mo/Au TESs that can degrade performance.

We describe prototype arrays of magnetically coupled microcalorimeters fabricated with an approach scalable to very large format arrays. The superconducting interconnections and sensor coils have sufficiently low inductance in the wiring and sufficiently high inductance in the coils in each pixel, to enable arrays containing greater than 4000 sensors and 100,000 X-ray absorbers to be used in future astrophysics missions such as Lynx. We have used projection lithography to create submicron patterns (e.g., 400-nanometer-lines and spaces) in our niobium sensor coils and wiring, integrated with gold-erbium sensor films and gold X-ray absorbers. Our prototype devices will explore the device physics of metallic magnetic calorimeters as feature sizes are reduced to nanoscale.

We performed small-scale demonstrations at GSFC of high-resolution Xray TES microcalorimeters read out using a microwave SQUID multiplexer. This work is part of our effort to develop detector and readout technologies for future space-based X-ray instruments such as the microcalorimeter spectrometer envisaged for Lynx, a large mission concept under development for the Astro 2020 Decadal Survey. In this paper we describe our experiment, including details of a recently designed, microwave-optimized low-temperature setup that is thermally anchored to the 55mKstage of our laboratory ADR. Using aROACH2 FPGA at room temperature, we read out pixels of a GSFC-built detector array via a NIST-built multiplexer chip with Nb coplanar waveguide resonators coupled to rf-SQUIDs. The resonators are spaced 6 MHz apart (at ∼ 5.9 GHz) and have quality factors of ∼ 15,000. In our initial demonstration, we used flux-ramp modulation frequencies of 125 kHz to read out 5 pixels simultaneously and achieved spectral resolutions of 2.8-3.1 eV FWHM at 5.9 keV. Our subsequent work is ongoing: to-date we have achieved a median spectral resolution of 3.4 eV FWHM at 5.9 keV while reading out 28 pixels simultaneously with flux-ramp frequencies of 160 kHz. We present the measured system-level noise and maximum slew rates and briefly describe our future development work.

In transition-edge sensors (TESs), the addition of normal metal stripes on top of the superconducting bilayer, perpendicular to the current direction, is known to globally alter the sensitivity of the resistance R to changes in temperature T and current I. Here, we describe measurements of the dependence of the TES current on magnetic field B, bath temperature and voltage bias in devices with various numbers of stripes. We show that the normal metal features have a profound effect on the appearance of localized regions of very large (T/R) dR/dT. We associate this with changes in the current distribution and corresponding changes in the oscillatory pattern of I (B). 140 μm TESs with no stripes are found to have a relatively smooth resistive transition and sufficiently low noise that the measured energy resolution is 1.6 eV for X-rays of 1.5 keV. The predicted energy resolution at 6 keV is better than 2 eV, once the heat capacity is optimized for these higher energies..

Exploring the effects of size and geometry of normal metal features on the transition shapes and performance of transition-edge sensor microcalorimeters. The spectral resolution of transition-edge sensor (TES) microcalorimeters is very sensitive to the specific dependencies of the resistance R in the superconducting transition on the current I, magnetic field B, and temperature T. In particular, it has been shown that transitions that are very steep in (R,T) space lead to a significant noise term, in excess of conventional expectations. This so-called unexplained noise is known to be reduced by the addition of normal metal stripes across the TES perpendicular to the direction of current flow. These normal metal stripes have been shown to drastically alter the oscillatory patterns seen in measurements of the critical current as a function of magnetic field. However, there are many remaining questions about the exact impact of the stripes on current distributions within the TES, the Fraunhofer pattern and, therefore, the shape of the R(I, B, T) surface. Through measurements of the resistance under DC bias of TES devices of various sizes, with different stripe patterns and dimensions, we will discuss how these stripes can affect the R(I, B, T) surface. In addition, using measurements and analysis of the noise spectra of various devices we will present how these changes to the stripe pattern may affect the performance of the TES. In particular, we will discuss strategies to reduce the presence of localized discontinuities in the derivative of R, associated with increased noise, while maintaining the globally low levels of unexplained noise currently achieved with conventional metal stripe patterns. Implementing these strategies is a path towards producing large arrays with highly uniform transitions and high spectral resolution. These large uniform arrays will be required for future x-ray astronomy applications, such as the X-IFU on ATHENA.

Using ultraviolet photon pulses, we have probed the internal behavior of a molybdenum-gold Magnetic Penetration Thermometer (MPT) that we designed for x-ray microcalorimetry. In this low-temperature detector, the diamagnetic response of a superconducting MoAu bilayer is used to sense temperature changes in response to absorbed photons. We have previously described an approximate model that explains the high responsivity of the detector to temperature changes as a consequence of a Meissner transition of the molybdenum-gold film in the magnetic field applied by the superconducting circuit used to bias the detector. We compare measurements of MPT heat capacity and thermal conductance, derived from UV photon pulse data, to our model predictions for the thermodynamic properties of the sensor and for the electron cooling obtained by quasiparticle recombination. Our data on electron cooling power is also relevant to the operation of other superconducting detectors, such as Microwave Kinetic Inductance Detectors.

Micro-X is a sounding rocket borne X-ray telescope that utilizes transition edge sensors to perform imaging spectroscopy with a high level of energy resolution. Its 2.1m focal length X-ray optic has an effective area of 300 sq cm, a field of view of 11.8 arcmin, and a bandpass of 0.12.5 keV. The detector array has 128 pixels and an intrinsic energy resolution of 4.5 eV FWHM. The integration of the system has progressed with functional tests of the detectors and electronics complete, and performance characterization of the detectors is underway. We present an update of ongoing progress in preparation for the upcoming launch of the instrument.

In this paper we present a first assessment of the impact of various forms of instrumental crosstalk on the science performance of the X-ray Integral Field Unit (X-IFU) on the Athena X-ray mission. This assessment is made using the SIXTE end-to-end simulator in the context of one of the more technically challenging science cases for the XIFU instrument. Crosstalk considerations may influence or drive various aspects of the design of the array of high-count-rate Transition Edge Sensor (TES) detectors and its Frequency Domain Multiplexed (FDM) readout architecture. The Athena X-ray mission was selected as the second L-class mission in ESA's Cosmic Vision 2015–25 plan, with alaunch foreseen in 2028, to address the theme ''Hot and Energetic Universe"1. One of the two instruments on boardAthena is the X-ray Integral Field Unit2 (X-IFU) which is based on an array of ~3800 Transition Edge Sensors (TES's)operated at a temperature of ~90 mK. The science cases pose an interesting challenge for this instrument, as they requirea combination of high energy resolution (2.5 eV FWHM or better), high spatial resolution (5 arcsec or better) and highcount rate capability (several tens of counts per second per detector for point sources as bright as 10 mCrab).The performance at the single sensor level has been demonstrated3, but the operation of such detectors in an array, usingmultiplexed readout, brings additional challenges, both for the design of the array in which the sensors are placed and forthe readout of the sensors. The readout of the detector array will be based on Frequency Domain Multiplexing (FDM)4.In this system of detectors and readout, crosstalk can arise through various mechanisms: on the TES array, neighboringsensors can couple through thermal crosstalk. Detectors adjacent in carrier frequency may suffer from electrical crosstalkdue to the finite width of the bandpass filters, and shared sources of impedance in their signal lines. The signals from theindividual detectors are summed and then amplified by a pair of SQUID amplifiers before being sent to warm front-endelectronics. The transfer function of the SQUID amplifiers is non-linear, which will give rise to higher harmonics ofcarriers and intermodulation products when multiple signal pulses are simultaneously present in the SQUID. Under highcount rate conditions this is another source of crosstalk. The effect of all these crosstalk sources is that parasitic pulseswill appear in the record of a signal pulse which will create a stochastic offset of the measured energy and thus adegradation of the energy resolution.

The focal plane of the X-ray integral field unit (X-IFU) for ESA's Athena X-ray observatory will consist of approximately 4000 transition edge sensor (TES) x-ray microcalorimeters optimized for the energy range of 0.2 to 12 kiloelectronvolts. The instrument will provide unprecedented spectral resolution of approximately 2.5 electronvolts at energies of up to 7 kiloelectronvolts and will accommodate photon fluxes of 1 milliCrab (90 counts per second) for point source observations. The baseline configuration is a uniform large pixel array (LPA) of 4.28 arcseconds pixels that is read out using frequency domain multiplexing (FDM). However, an alternative configuration under study incorporates an 18 by × 18 small pixel array (SPA) of 2 arcseconds pixels in the central approximately 36 arcseconds region. This hybrid array configuration could be designed to accommodate higher fluxes of up to 10 milliCrabs (900 counts per second) or alternately for improved spectral performance (less than 1.5 electronvolts) at low count-rates. In this paper we report on the TES pixel designs that are being optimized to meet these proposed LPA and SPA configurations. In particular we describe details of how important TES parameters are chosen to meet the specific mission criteria such as energy resolution, count-rate and quantum efficiency, and highlight performance trade-offs between designs. The basis of the pixel parameter selection is discussed in the context of existing TES arrays that are being developed for solar and x-ray astronomy applications. We describe the latest results on DC biased diagnostic arrays as well as large format kilo-pixel arrays and discuss the technical challenges associated with integrating different array types on to a single detector die.

This paper summarizes a preliminary design concept for the focal plane assembly of the X-ray Integral Field Unit on the Athena spacecraft, an imaging microcalorimeter that will enable high spectral resolution imaging and point-source spectroscopy. The instrument's sensor array will be a 3840-pixel transition edge sensor (TES) microcalorimeter array, with a frequency domain multiplexed SQUID readout system allowing this large-format sensor array to be operated within the thermal constraints of the instrument's cryogenic system. A second TES detector will be operated in close proximity to the sensor array to detect cosmic rays and secondary particles passing through the sensor array for off-line coincidence detection to identify and reject events caused by the in-orbit high-energy particle background. The detectors, operating at 55 mK, or less, will be thermally isolated from the instrument cryostat's 2 K stage, while shielding and filtering within the FPA will allow the instrument's sensitive sensor array to be operated in the expected environment during both on-ground testing and in-flight operation, including stray light from the cryostat environment, low-energy photons entering through the X-ray aperture, low-frequency magnetic fields, and high-frequency electric fields.

We present the design of tessim, a simulator for the physics of transition edge sensors developed in the framework of the Athena end to end simulation effort. Designed to represent the general behavior of transition edge sensors and to provide input for engineering and science studies for Athena, tessim implements a numerical solution of the linearized equations describing these devices. The simulation includes a model for the relevant noise sources and several implementations of possible trigger algorithms. Input and output of the software are standard FITS-les which can be visualized and processed using standard X-ray astronomical tool packages. Tessim is freely available as part of the SIXTE package (http:www.sternwarte.uni-erlangen.deresearchsixte).

Athena is a European X-ray observatory, scheduled for launch in 2028. Athena will employ a high-resolution imaging spectrometer called X-ray integral field unit (X-IFU), consisting of an array of 4000 transition edge sensor (TES) microcalorimeter pixels. For the readout of X-IFU, we are developing frequency domain multiplexing, which is the baseline readout system. In this paper, we report on the performance of a TES X-ray calorimeter array fabricated at Goddard Space Flight Center (GSFC) at MHz frequencies for the baseline of X-IFU detector. During single-pixel AC bias characterization, we measured X-ray energy resolutions (at 6 keV) of about 2.9 eV at both 2.3 and 3.7 MHz. Furthermore, in the multiplexing mode, we measured X-ray energy resolutions of about 2.9 eV at 1.3 and 1.7 MHz.

The traditional method of applying a digital optimal filter to measure X-ray pulses from transition-edge sensor (TES) devices does not achieve the best energy resolution when the signals have a highly non-linear response to energy, or the noise is non-stationary during the pulse. We present an implementation of a method to analyze X-ray data from TESs, which is based upon principal component analysis (PCA). Our method separates the X-ray signal pulse into orthogonal components that have the largest variance. We typically recover pulse height, arrival time, differences in pulse shape, and the variation of pulse height with detector temperature. These components can then be combined to form a representation of pulse energy. An added value of this method is that by reporting information on more descriptive parameters (as opposed to a single number representing energy), we generate a much more complete picture of the pulse received. Here we report on progress in developing this technique for future implementation on X-ray telescopes. We used an 55Fe source to characterize Mo/Au TESs. On the same dataset, the PCA method recovers a spectral resolution that is better by a factor of two than achievable with digital optimal filters.

We report on measurements of the detected signal pulses in a molybdenum-gold Magnetic Penetration Thermometer (MPT) in response to absorption of one or more 3 eV photons. We designed and used this MPT sensor for x-ray microcalorimetry. In this device, the diamagnetic response of a superconducting MoAu bilayer is used to sense temperature changes in response to absorbed photons, and responsivity is enhanced by a Meissner transition in which the magnetic flux penetrating the sensor changes rapidly to minimize free energy in a mixed superconducting normal state. We have previously reported on use of our MPT to study a thermal phonon energy loss to the substrate when absorbing x-rays. We now describe results of extracting heat capacity C and thermal conductance G values from pulse height and decay time of MPT pulses generated by 3 eV photons. The variation in C and G at temperatures near the Meissner transition temperature (set by an internal magnetic bias field) allow us to probe the behavior in superconducting normal mixed state of the condensation energy and the electron cooling power resulting from quasi-particle recombination and phonon emission. The information gained on electron cooling power is also relevant to the operation of other superconducting detectors, such as Microwave Kinetic Inductance Detectors.

We have produced a variety of superconducting transition edge sensor array designs for microcalorimetric detection of x-rays. Designs include kilopixel scale arrays of relatively small sensors (approximately 75 micron pitch) atop a thick metal heat sinking layer as well as arrays of membrane-isolated devices on 250 micron and up to 600 micron pitch. We discuss fabrication and performance of microstripline wiring at the small scales achieved to date. We also address fabrication issues with reduction of absorber contact area in small devices.

Like MMCs, MPTs enable high energy microcalorimeters with zero bias power dissipation and potential resolution < 1 eV. MPTs can provide d(phi)/dT as large as 1000 (Phi)(sub 0)/K, with no excess noise, thereby reducing the importance of SQUID noise. Long coherence length in a Type-I superconducting MoAu film offers multiple advantages for efficient flux expulsion in MPT. Region of steepest d(phi)/dT is the Meissner effect in the small device; flux is expelled/penetrates to minimize free energy. Steepness of transition can be engineered with choice of film thickness and coil pitch relative to lambda(sub eff)(0), ratio of T/T(sub c), and bias circuit inductance.

We have produced a variety of superconducting transition edge sensor array designs for microcalorimetric detection of x-rays. Arrays are characterized with a time division SQUID multiplexer such that greater than 10 devices from an array can be measured in the same cooldown. Designs include kilo pixel scale arrays of relatively small sensors (-75 micron pitch) atop a thick metal heatsinking layer as well as arrays of membrane-isolated devices on 250 micron and up to 600 micron pitch. We discuss fabrication and performance of microstripline wiring at the small scales achieved to date. We also address fabrication issues with reduction of absorber contact area in small devices.

The Micro-X sounding rocket program will fly a 128-element array of transition-edge-sensor microcalorimeters to enable high-resolution X-ray imaging spectroscopy of the Puppis-A supernova remnant. To match the angular resolution of the optics while maximizing the field-of-view and retaining a high energy resolution (< 4 eV at 1 keV), we have designed the pixels using 600 x 600 sq. micron Au/Bi absorbers, which overhang 140 x 140 sq. micron Mo/Au sensors. The data-rate capabilities of the rocket telemetry system require the pulse decay to be approximately 2 ms to allow a significant portion of the data to be telemetered during flight. Here we report experimental results from the flight array, including measurements of energy resolution, uniformity, and absorber thermalization. In addition, we present studies of test devices that have a variety of absorber contact geometries, as well as a variety of membrane-perforation schemes designed to slow the pulse decay time to match the telemetry requirements. Finally, we describe the reduction in pixel-to-pixel crosstalk afforded by an angle-evaporated Cu backside heatsinking layer, which provides Cu coverage on the four sidewalls of the silicon wells beneath each pixel.

Magnetically coupled calorimeters (MCC) have extremely high potential for x-ray applications due to the inherent high energy resolution capability and being non-dissipative. Although very high energy-resolution has been demonstrated, until now there has been no demonstration of multiplexed read-out. We report on the first realization of a time domain multiplexed (TDM) read-out. While this has many similarities with TDM of transition-edge-sensors (TES), for MGGs the energy resolution is limited by the SQUID read-out noise and requires the well established scheme to be altered in order to minimize degradation due to noise aliasing effects. In cur approach, each pixel is read out by a single first stage SQUID (SQ1) that is operated in open loop. The outputs of the SQ1 s are low-pass filtered with an array of low cross-talk inductors, then fed into a single-stage SQUID TD multiplexer. The multiplexer is addressed from room temperature and read out through a single amplifier channel. We present results achieved with a new detector platform. Noise performance is presented and compared to expectations. We have demonstrated multiplexed X-ray spectroscopy at 5.9keV with delta_FWHM=10eV. In an optimized setup, we show it is possible to multiplex 32 detectors without significantly degrading the Intrinsic detector resolution.

Weak link behavior in transition-edge sensor (TES) microcalorimeters creates the need for a more careful characterization of a device's thermal characteristics through its transition. This is particularly true for small TESs where a small change in the bias current results in large changes in effective transition temperature. To correctly interpret measurements, especially complex impedance, it is crucial to know the temperature-dependent thermal conductance, G(T), and heat capacity, C(T), at each point through the transition. We present data illustrating these effects and discuss how we overcome the challenges that are present in accurately determining G and T from I-V curves. We also show how these weak link effects vary wi.th TES size. Additionally, we use this improVed understanding of G(T) to determine that, for these TES microcalorimeters. Kaptiza boundary resistance dominates the G of devices with absorbers while the electron-phonon coupling also needs to be considered when determining G for devices without absorbers

Magnetic calorimeters have been under development for over 20 years targeting a wide variety of different applications that require very high resolution spectroscopy. They have a number of properties that distinguish them from other 10w temperature detectors. In this paper we review these properties and emphasize the types of application to which they are most suited. We will describe what has been learned about the best materials, geometries, and read-out amplifiers and our understanding of the measured performance and theoretical limits. While most magnetic calorimeter research has concentrated on the use of paramagnets to provide the temperature sensitivity, recently magnetically coupled microcalorimeters have been in development that utilize the diamagnetic response of superconductors. We will contrast some of the properties of the two different magnetic sensor types.

The ideal X-ray camera for astrophysics would have more than a million pixels and provide an energy resolution of better than leV FWHM for energies up to 10 keY. We have microfabricated and characterized thin-film magnetic penetration thermometers (MPTs) that show great promise towards meeting these capabilities. MPTs operate in similar fashion to metallic magnetic calorimeters (MMCs), except that a superconducting sensor takes the place of a paramagnetic sensor and it is the temperature dependence of the superconductor's diamagnetic response that provides the temperature sensitivity. We present a description of the design and performance of our prototype thin-film MPTs with MoAu bilayer sensors, which have demonstrated an energy resolution of approx 2 eV FWHM at 1.5 keY and 4.3 eV FWHM at 5.9 keY.

We have developed a process to integrate microstripline wiring with transition edge sensors (TES). The process includes additional layers for metal-etch stop and dielectric adhesion to enable recovery of parameters achieved in non-microstrip pixel designs. We report on device parameters in close-packed TES arrays achieved with the microstrip process including R(sub n), G, and T(sub c) uniformity. Further, we investigate limits of this method of producing high-density, microstrip wiring including critical current to determine the ultimate scalability of TES arrays with two layers of wiring.

Microcalorimeters onboard future x-ray observatories require an anticoincidence detector to remove environmental backgrounds. In order to most effectively integrate this anti-coincidence detector with the main microcalorimeter array, both instruments should use similar read-out technology. The detectors used in the Cryogenic Dark Matter Search (CDMS) use a phonon measurement technique that is well suited for an anti-coincidence detector with a microcalorimeter array using SQUID readout. This technique works by using a transition-edge sensor (TES) connected to superconducting collection fins to measure the athermal phonon signal produced when an event occurs in the substrate crystal. Energy from the event propagates through the crystal to the superconducting collection fins, creating quasiparticles, which are then trapped as they enter the TES where they produce a signal. We are currently developing a prototype anti-coincidence detector for future x-ray missions and have recently fabricated test devices with Mo/Au TESs and Al collection fins. We present results from the first tests of these devices which indicate a proof of concept that quasiparticle trapping is occurring in these materials.

We are developing small pitch transition-edge sensor (TES) X-ray detectors optimized for solar astronomy. These devices are fabricated on thick Si substrates with embedded Cu heat-sink layer. We use 35 x 35 square micrometers Mo/Au TESs with 4.5 micrometer thick Au absorbers. We have tested devices with different geometric absorber stem contact areas with the TES and surrounding substrate area. This allows us to investigate the loss of athermal phonons to the substrate. Results show a correlation between thc stem contact area and a broadening in the spectral line shape indicative of athermal phonon loss. When the contact area is minimized we have obtained exceptional broadband spectral resolution of 1.28 plus or minus 0.03 eV at an energy of 1.5 keV, 1.58 plus or minus 0.07 eV at 5.9 keV and 1.96 plus or minus 0.08 eV at 8 keV. The linearity in the measured gain scale is understood in the context of the longitudinal proximity effect from the electrical bias leads resulting in transition characteristics that are strongly dependent upon TES size.

At SRON we are studying the performance of a Goddard Space Flight Center single pixel TES microcalorimeter operated in an AC bias configuration. For x-ray photons at 6 keV the pixel shows an x-ray energy resolution Delta E(sub FWHM) = 3.7 eV, which is about a factor 2 worse than the energy resolution observed in an identical DC-biased pixel. In order to better understand the reasons for this discrepancy we characterized the detector as a function of temperature, bias working point and applied perpendicular magnetic field. A strong periodic dependency of the detector noise on the TES AC bias voltage is measured. We discuss the results in the framework of the recently observed weak-link behaviour of a TES microcalorimeter.

We are developing kilopixel arrays of TES microcalorimeters to enable high-resolution x-ray imaging spectrometers for future x-ray observatories and laboratory astrophysics experiments. Our current array design was targeted as a prototype for the X-ray Microcalorimeter Spectrometer proposed for the International X-ray Observatory, which calls for a 40×40-pixel core array of 300 micron devices with 2.5 eV energy resolution (at 6 keV). Here we present device characterization of our 32×32 arrays, including x-ray spectral performance of individual pixels within the array. We present our results in light of the understanding that our Mo/Au TESs act as weak superconducting links, causing the TES critical current (I(sub c)) and transition shape to oscillate with applied magnetic field (B). We show I(sub c)(B) measurements and discuss the uniformity of these measurements across the array, as well as implications regarding the uniformity of device noise and response. In addition, we are working to reduce pixel-to-pixel electrical and thermal crosstalk; we present recent test results from an array that has microstrip wiring and an angle-evaporated copper backside heatsinking layer, which provides copper coverage on the four sidewalls of the silicon wells beneath each pixel.

We are developing magnetic penetration thermometers (MPTs) for applications in X-ray astronomy. These non-dissipative devices consist of an X-ray absorber in good thermal contact to a superconducting thin film with a transition temperature around T=100mK. A microfabricated superconducting planar inductor underneath is used to store a persistent current and couple the superconductor's diamagnetic response to a readout SQUID. The strong temperature dependence of the diamagnetic response make these devices suitable for highly sensitive macroscopic thermometers that are capable of achieving very high energy resolution. We present results achieved with MPTs consisting of MoAu bilayer sensors attached to overhanging square 250 micron by 250 micron gold absorbers that have demonstrated an energy resolution of delta E_FWHM=2.3eV at an X-ray energy of 5.9keV. A similar device has shown delta E_FWHM=2.0eV at 1.5 keV. Under certain conditions and for specific device geometries, the temperature responsivity of the MPTs can vary on long timescales degrading the spectral performance. We present the characterization of different inductor geometries to optimize the design for the highest possible temperature sensitivity and compare different device designs with respect to responsivity stability.

We are developing kilo-pixel arrays of transition-edge sensor (TES) microcalorimeters for future X-ray astronomy observatories or for use in laboratory astrophysics applications. For example, Athena/XMS (currently under study by the european space agency) would require a close-packed 32x32 pixel array on a 250-micron pitch with < 3.0 eV full-width-half-maximum energy resolution at 6 keV and at count-rates of up to 50 counts/pixel/second. We present characterization of 32x32 arrays. These detectors will be readout using state of the art SQUID based time-domain multiplexing (TDM). We will also present the latest results in integrating these detectors and the TDM readout technology into a 16 row x N column field-able instrument.

We are developing small-pixel transition-edge-sensor (TES) for solar physics and astrophysics applications. These large format close-packed arrays are fabricated on solid silicon substrates and are designed to accommodate count-rates of up to a few hundred counts/pixel/second at a FWHM energy resolution approximately 2 eV at 6 keV. We have fabricated versions that utilize narrow-line planar and stripline wiring. We present measurements of the performance and uniformity of kilo-pixel arrays, incorporating TESs with single 65-micron absorbers on a 7s-micron pitch, as well as versions with more than one absorber attached to the TES, 4-absorber and 9-absorber "Hydras". We have also fabricated a version of this detector optimized for lower energies and lower count-rate applications. These devices have a lower superconducting transition temperature and are operated just above the 40mK heat sink temperature. This results in a lower heat capacity and low thermal conductance to the heat sink. With individual single pixels of this type we have achieved a FWHM energy resolution of 0.9 eV with 1.5 keV Al K x-rays, to our knowledge the first x-ray microcalorimeter with sub-eV energy resolution. The 4-absorber and 9-absorber versions of this type achieved FWHM energy resolutions of 1.4 eV and 2.1 eV at 1.5 keV respectively. We will discuss the application of these devices for new astrophysics mission concepts.

We are developing multi-absorber Transition-Edge Sensors (TESs) for applications in x-ray astronomy. These position-sensitive devices consist of multiple x-ray absorbers each with a different thermal coupling to a single readout TES. Heat diffusion between the absorbers and the TES gives rise to a characteristic pulse shape corresponding to each absorber element and enables position discrimination. The development of these detectors is motivated by a desire to maximize focal plane arrays with the fewest number of readout channels. In this contribution we report on the first results from devices consisting of nine) 65 X 65 sq. microns Au x-ray absorbers) 5 microns thick. These are coupled to a single 35 X 35 sq. microns Mo/Au bilayer TES. These devices have demonstrated full-width-half-maximum (FWHM) energy resolution of 2.1 eV at 1.5 keV) 2.5 eV at 5.9 keV and 3.3 eV at 8 keV. This is coupled with position discrimination from pulse shape over the same energy range. We use a finite-element model to reproduce the measured pulse shapes and investigate the detector non-linearity with energy) which impacts on the devices position sensitivity and energy resolution.

The temperature dependent behavior of a superconducting body in an applied magnetic field involves flux penetration/expulsion both from screening currents (within a magnetic penetration depth) and variations in the superconducting order parameter (locally to form vortices or a mixed state, or globally in the Meissner effect). The temperature dependence of the magnetic penetration depth, in particular, has been used to make highly sensitive macroscopic thermometers. For the microscopic device volumes required in sensitive low temperature photon detectors, properties of actual thin film materials, non-uniformity of applied magnetic fields, and the influence of measurement circuit dynamics are complicating factors. We discuss the various penetration effects as demonstrated in a particularly promising combination of material and geometry that we have used to make sensitive x-ray microcalorimeters.

SRON is developing Frequency Domain Multiplexing (FDM) for the read-out of transition edge sensor (TES) soft x-ray microcalorimeters for the XMS instrument of the International X-ray Observatory and far-infrared bolometers for the SAFARI instrument on the Japanese mission SPICA. In FDM the TESs are AC voltage biased at frequencies from 0.5 to 6 MHz in a superconducting LC resonant circuit and the signal is read-out by low noise and high dynamic range SQUIDs amplifiers. The TES works as an amplitude modulator. We report on several AC bias experiments performed on different detectors. In particular, we discuss the results on the characterization of Goddard Space Flight Center x-ray pixels and SRON bolometers. The paper focuses on the analysis of different read-out configurations developed to optimize the noise and the impedance matching between the detectors and the SQUID amplifier. A novel feedback network electronics has been developed to keep the SQUID in flux locked loop, when coupled to superconducting high Q circuits, and to optimally tune the resonant bias circuit. The achieved detector performances are discussed in view of the instrument requirement for the two space missions.

We are developing kilo-pixel arrays of TES microcalorimeters to enable high-resolution X-ray imaging spectrometers for future X-ray observatories and laboratory astrophysics experiments. Our current array design was targeted as a prototype for the X-ray Microcalorimeter Spectrometer proposed for the International X-ray Observatory, which calls for a 40x40-pixel core array of 300 micron devices with 2.5 e V energy resolution (at 6 keV). Here we present device characterization of our 32x32 arrays, including X-ray spectral performance of individual pixels within the array. We present our results in light of the understanding that our Mo/Au TESs act as weak superconducting links, causing the TES critical current (Ic) and transition shape to oscillate with applied magnetic field (B). We show Ic(B) measurements and discuss the uniformity of these measurements across the array, as well as implications regarding the uniformity of device noise and response. In addition, we are working to reduce pixel-to-pixel electrical and thermal crosstalk; we present recent test results from an array that has microstrip wiring and an angle-evaporated Cu backside heatsinking layer, which provides Cu coverage on the four sidewalls of the silicon wells beneath each pixel.

Driven initially by the desire for X-ray microcalorimeter arrays suitable for imaging the dynamic solar corona, we have developed a transition-edge-sensor (TES) microcalorimeter optimization that exhibits a unique combination of high spectral resolving power and a wide X-ray bandpass. These devices have achieved spectral performance of dE approximately 1.3 eV FWHM at 1.5 keV, 1.6 eV at 6 keV, and 2.0 eV at 8 keV, using small TESs (e.g., approximately 35 micron x 35 micron) that operate in a regime in which the superconducting transition is highly current dependent. In order to accommodate high X-ray count rates, the devices sit directly on a solid substrate instead of on membranes, and we use an embedded heatsinking layer to reduce pixel-to-pixel crosstalk. We will present results from devices with a range of TES and absorber sizes, and from device wafers with varied embedded heatsink materials. This contribution will focus on count-rate capabilities, including a discussion of the trade-off between count rate and energy resolution, and the heatsinking design. We will also present preliminary tests of array readout using a code-division multiplexed SQUID readout scheme, which may be necessary to enable large arrays of these fast devices.

Having developed a transition-edge-sensor (TES) calorimeter design that enables high spectral resolution in high fill-factor arrays, we now present array-scale results from 32-pixel arrays of identical closely packed TES pixels. Each pixel in such an array contains a Mo/Au bilayer with a transition temperature of 0.1 K and an electroplated Au or Au/Bi xray absorber. The pixels in an array have highly uniform physical characteristics and performance. The arrays are easy to operate due to the range of bias voltages and heatsink temperatures over which solution better than 3 eV at 6 keV can be obtained. Resolution better than 3 eV has also been obtained with 2x8 time-division SQUID multiplexing. We will present the detector characteristics and show spectra acquired through the read-out chain from the multiplexer electronics through the demultiplexer software to real-time signal processing. We are working towards demonstrating this performance over the range of count rates expected in the observing program of the Constellation-X observatory. We mill discuss the impact of increased counting rate on spectral resolution, including the effects of crosstalk and optimal-filtering dead time.

We report on the development of position-sensitive transition-edge sensors (PoST's) for future x-ray astronomy missions such as the International X-ray Observatory (IXO), currently under study by NASA and ESA. PoST's consist of multiple absorbers each with a different thermal coupling to one or more transition-edge sensor (TES). This differential thermal coupling between absorbers and TES's results in different characteristic pulse shapes and allows position discrimination between the different pixels. The development of PoST's is motivated by a desire to achieve maximum focal-plane area with the least number of readout channels and as such. PoST's are ideally suited to provide a focal-plane extension to the Constellation-X microcalorimeter array. We report the first experimental results of our latest one and two channel PoST's, which utilize fast thermalizing electroplated Au/Bi absorbers coupled to low noise Mo/Au TES's - a technology already successfully implemented in our arrays of single pixel TES's. We demonstrate 6 eV energy resolution coupled with spatial sensitivity in the keV energy range. We also report on the development of signal processing algorithms to optimize energy and position sensitivity of our detectors.

Having already developed a transition-edge-sensor (TES) microcalorimeter design that enables uniform and reproducible high spectral resolution (routinely better than 3 eV resolution at 6 keV) and is compatible with high fill-factor arrays, we are now working towards demonstrating this performance at high count rates and with the multiplexed read-out needed for instrumenting the Constellation-X X-ray Microcalorimeter Spectrometer (XMS) focal plane array. Design changes that increase the speed of the individual XMS pixels, such as lowering the heat capacity or increasing the thermal conductance of the link to the 50-mK heatsink, result in larger, faster signals, thus the coupling to the multiplexer and the overall bandwidth of the electronics must accommodate this increase in slew rate. In order to operate the array with high incident x-ray flux without unacceptable degradation of the spectral resolution, the magnitude of thermal and electrical crosstalk must be controlled. We will discuss recent progress in the thermal and electrical designs of our close-packed TES arrays, and we will present spectra acquired through the read-out chain from the multiplexer electronics, through the demultiplexer software, to real-time signal processing.

We are developing arrays of position-sensitive transition-edge sensor (POST) X-ray detectors for future astronomy missions such as NASA's Constellation-X. The POST consists of multiple absorbers thermally coupled to one or more transition-edge sensor (TES). Each absorber element has a different thermal coupling to the TES. This results in a distribution of different pulse shapes and enables position discrimination between the absorber elements. POST'S are motivated by the desire to achieve the largest possible focal plane area with the fewest number of readout channels and are ideally suited to increasing the Constellation-X focal plane area, without comprising on spatial sampling. Optimizing the performance of POST'S requires careful design of key parameters such as the thermal conductances between the absorbers, TES and the heat sink. as well as the absorber heat capacities. Using recently developed signal processing algorithms we have investigated the trade-off between position-sensitivity, energy resolution and pulse decay time. based on different device design parameters for PoST's. Our new generation of PoST's utilize technology successfully developed on high resolution (approximately 2.5eV) single pixels arrays of Mo/Au TESs. also under development for Constellation-X. This includes noise mitigation features on the TES and low resistivity electroplated absorbers. We report on the first experimental results from these new one and two-channel PoST"s, consisting of all Au and composite Au/Bi absorbers, which are designed to achieve an energy resolution of < 10 eV. coupled with count-rates of 100's per pixel per second and position sensitivity over the energy range 0.3-10 keV.

We describe our current fabrication process for arrays of superconducting transition edge sensor microcalorimeters, which incorporates superconducting Mo/Au bilayers and micromachined silicon structures. We focus on materials and integration methods for array heatsinking with our bilayer and micromachining processes. The thin superconducting molybdenum bottom layer strongly influences the superconducting behavior and overall film characteristics of our molybdenum/gold transition-edge sensors (TES). Concurrent with our successful TES microcalorimeter array development, we have started to investigate the thin film properties of molybdenum monolayers within a given phase space of several important process parameters. The monolayers are sputtered or electron-beam deposited exclusively on LPCVD silicon nitride coated silicon wafers. In our current bilayer process, molybdenum is electron-beam deposited at high wafer temperatures in excess of 500 degrees C. Identifying process parameters that yield high quality bilayers at a significantly lower temperature will increase options for incorporating process-sensitive auxiliary array components (AAC) such as array heat sinking and electrical interconnects into our overall device process. We are currently developing two competing technical approaches for heat sinking large compact TES microcalorimeter arrays. Our efforts to improve array heat sinking and mitigate thermal cross-talk between pixels include copper backside deposition on completed device chips and copper-filled micro-trenches surface-machined into wafers. In addition, we fabricated prototypes of copper through-wafer microvias as a potential way to read out the arrays. We present an overview on the results of our molybdenum monolayer study and its implications concerning our device fabrication. We discuss the design, fabrication process, and recent test results of our AAC development.

We are developing arrays of superconducting transition-edge sensors (TES) for imaging spectroscopy telescopes such as the XMS on Constellation-X. While our primary focus has been on arrays that meet the XMS requirements (of which, foremost, is an energy resolution of 2.5 eV at 6 keV and a bandpass from approx. 0.3 keV to 12 keV), we have also investigated other optimizations that might be used to extend the XMS capabilities. In one of these optimizations, improved resolution below 1 keV is achieved by reducing the heat capacity. Such pixels can be based on our XMS-style TES's with the separate absorbers omitted. These pixels can added to an array with broadband response either as a separate array or interspersed, depending on other factors that include telescope design and science requirements. In one version of this approach, we have designed and fabricated a composite array of low-energy and broad-band pixels to provide high spectral resolving power over a broader energy bandpass than could be obtained with a single TES design. The array consists of alternating pixels with and without overhanging absorbers. To explore optimizations for higher count rates, we are also optimizing the design and operating temperature of pixels that are coupled to a solid substrate. We will present the performance of these variations and discuss other optimizations that could be used to enhance the XMS or enable other astrophysics experiments.

We present measurements of high fill-factor arrays of superconducting transition-edge x-ray microcalorimeters designed to provide rapid thermalization of the x-ray energy. We designed an x-ray absorber that is cantilevered over the sensitive part of the thermometer itself, making contact only at normal metal-features. With absorbers made of electroplated gold, we have demonstrated an energy resolution between 2.4 and 3.1 eV at 5.9 keV on 13 separate pixels. We have determined the thermal and electrical parameters of the devices throughout the superconducting transition, and, using these parameters, have modeled all aspects of the detector performance.

An ideal microcalorimeter is characterized by a constant energy resolution across the sensor's dynamic range. Any dependence of pulse shape on the position within the absorber where an event occurs leads to a degradation in resolution that is linear with event s energy (excess broadening). In this paper we present a numerical simulation that was developed to model the variation in pulse shape with position based on the thermal conductivity within the absorber and between the absorber, sensor, and heat bath, for arbitrarily shaped absorbers and sensors. All the parameters required for the simulation can be measured from actual devices. We describe how the thermal conductivity of the absorber material is determined by comparing the results of this model with data taken from a position sensitive detector in which any position dependent effect is purposely emphasized by making a long, narrow absorber that is read out by sensors on both end. Finally, we present the implications for excess broadening given the measured parameters of our X-ray microcalorimeters.

The proper understanding and modeling of a microcalorimeter s response requires the accurate knowledge of a handful of parameters, such as C, G, alpha, . . . . While a few of these, such 8s the normal state resistance and the total thermal conductance to the heat bath (G) are directly determined from the DC IV characteristics, some others, notoriously the heat capacity (C) and alpha, appear in degenerate combinations in most measurable quantities. The case of a complex microcalorimeter, i.e. one in which the absorber s heat capacity is connected by a finite thermal impedance to the sensor, and subsequently by another thermal impedance to the heat bath, results in an added ambiguity in the determination of the individual C's and G's. In general, the dependence of the microcalorimeter s complex impedance on these parameters varies with frequency. This variation allows us to determine the individual parameters by fitting the prediction of the microcalorimeter model to the impedance data. We describe in this paper our efforts at characterizing the Goddard X-ray microcalorimeters. Using the parameters determined with this method we them compare the pulse shape and noise spectra predicted by the microcalorimeter model to data taken with the same devices.

A Position Sensitive Transition-Edge Sensor (PoST) is a microcalorimeter device capable of one-dimensional imaging spectroscopy. The device consists of two Transition-Edge Sensors (TESs) connected to the ends of a long X-ray absorbing strip. The energy of a photon hitting the absorber and the position of the absorption event along the strip is measured from the response in the two sensors by analyzing the relative signal sizes, pulse rise times, and the sum of the pulses measured at each sensor, We report on the recent PoST effort at Goddard for applications to large field of view, high-energy- resolution, X-ray astrophysics.