6 results on '"Han, Geng"'
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2. Comprehensive model of electron energy deposition.
3. Can proximity x-ray lithography print 35 nm features? Yes.
4. Energy transfer between electrons and photoresist: Its relation to resolution.
5. Extension of x-ray lithography to 50 nm with a harder spectrum.
6. Lévy path integrals of particle on circle and some applications.
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