1. 2D Positioning Control System for the Planar Motion of a Nanopositioning Platform
- Author
-
Lucía C. Díaz-Pérez, J.A. Albajez, Marta Torralba, and José A. Yagüe-Fabra
- Subjects
0209 industrial biotechnology ,Computer science ,02 engineering and technology ,01 natural sciences ,Motion (physics) ,Halbach linear motors ,010309 optics ,020901 industrial engineering & automation ,Planar ,Software ,0103 physical sciences ,2D positioning control ,General Materials Science ,positioning uncertainty ,Instrumentation ,nanopositioning ,Fluid Flow and Transfer Processes ,business.industry ,Process Chemistry and Technology ,General Engineering ,Control engineering ,Paper based ,Linear motor ,Computer Science Applications ,Working range ,Control system ,business - Abstract
A novel nanopositioning platform (referred as NanoPla) in development has been designed to achieve nanometre resolution in a large working range of 50 mm ×, 50 mm. Two-dimensional (2D) movement is performed by four custom-made Halbach linear motors, and a 2D laser system provides positioning feedback, while the moving part of the platform is levitating and unguided. For control hardware, this work proposes the use of a commercial generic solution, in contrast to other systems where the control hardware and software are specifically designed for that purpose. In a previous paper based on this research, the control system of one linear motor implemented in selected commercial hardware was presented. In this study, the developed control system is extended to the four motors of the nanopositioning platform to generate 2D planar movement in the whole working range of the nanopositioning platform. In addition, the positioning uncertainty of the control system is assessed. The obtained results satisfy the working requirements of the NanoPla, achieving a positioning uncertainty of ±, 0.5 µ, m along the whole working range.
- Published
- 2019
- Full Text
- View/download PDF