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2D Positioning Control System for the Planar Motion of a Nanopositioning Platform
- Source :
- Applied Sciences, Volume 9, Issue 22, Zaguán. Repositorio Digital de la Universidad de Zaragoza, instname
- Publication Year :
- 2019
- Publisher :
- Multidisciplinary Digital Publishing Institute, 2019.
-
Abstract
- A novel nanopositioning platform (referred as NanoPla) in development has been designed to achieve nanometre resolution in a large working range of 50 mm &times<br />50 mm. Two-dimensional (2D) movement is performed by four custom-made Halbach linear motors, and a 2D laser system provides positioning feedback, while the moving part of the platform is levitating and unguided. For control hardware, this work proposes the use of a commercial generic solution, in contrast to other systems where the control hardware and software are specifically designed for that purpose. In a previous paper based on this research, the control system of one linear motor implemented in selected commercial hardware was presented. In this study, the developed control system is extended to the four motors of the nanopositioning platform to generate 2D planar movement in the whole working range of the nanopositioning platform. In addition, the positioning uncertainty of the control system is assessed. The obtained results satisfy the working requirements of the NanoPla, achieving a positioning uncertainty of &plusmn<br />0.5 &micro<br />m along the whole working range.
- Subjects :
- 0209 industrial biotechnology
Computer science
02 engineering and technology
01 natural sciences
Motion (physics)
Halbach linear motors
010309 optics
020901 industrial engineering & automation
Planar
Software
0103 physical sciences
2D positioning control
General Materials Science
positioning uncertainty
Instrumentation
nanopositioning
Fluid Flow and Transfer Processes
business.industry
Process Chemistry and Technology
General Engineering
Control engineering
Paper based
Linear motor
Computer Science Applications
Working range
Control system
business
Subjects
Details
- Language :
- English
- ISSN :
- 20763417
- Database :
- OpenAIRE
- Journal :
- Applied Sciences
- Accession number :
- edsair.doi.dedup.....1301e9191f3cafefd4d9797afea42d51
- Full Text :
- https://doi.org/10.3390/app9224860