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- [spi.nano]engineering sciences [physics]/micro and nanotechnologies/microelectronics4
- [spi.nano] engineering sciences [physics]/micro and nanotechnologies/microelectronics3
- mems3
- applied physics (physics.app-ph)2
- fos: physical sciences2
- nanoelectromechanical systems2
- nanoelectronics2
- nanomechanics2
- nanostructured materials2