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- thin films169
- [spi.other]engineering sciences [physics]/other24
- [spi.other] engineering sciences [physics]/other18
- [chim.mate]chemical sciences/material chemistry17
- [phys.cond.cm-ms]physics [physics]/condensed matter [cond-mat]/materials science [cond-mat.mtrl-sci]17
- [phys.cond]physics [physics]/condensed matter [cond-mat]16
- sputtering16
- [chim.mate] chemical sciences/material chemistry13
- [spi.mat]engineering sciences [physics]/materials13