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- ieee transactions on semiconductor manufacturing4
- journal of micro/nanolithography, mems & moems4
- sensors (14248220)4
- journal of nondestructive evaluation3
- ndt & e international2
- physica status solidi. a: applications & materials science2
- sensors2
- sensors basel switzerland2
- emc 2008 14th european microscopy congress 1-5 september 2008, aachen, germany : volume 1: instrumentation and methods1