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Journal
- japanese journal of applied physics51
- ieej transactions on sensors and micromachines46
- journal of micromechanics and microengineering39
- cheminform37
- sensors and actuators a: physical33
- journal of micromechanics & microengineering21
- the proceedings of the jsme annual meeting19
- ieee transactions on ultrasonics, ferroelectrics, and frequency control16
- micromachines16