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- microelectronic engineering29
- proceedings of spie19
- journal of vacuum science & technology b, nanotechnology and microelectronics: materials, processing, measurement, and phenomena9
- journal of micro/nanolithography, mems & moems6
- novel patterning technologies 20235
- journal of micromechanics & microengineering4
- journal of micromechanics and microengineering4
- journal of photopolymer science and technology4
- journal of vacuum science & technology: part b-nanotechnology & microelectronics4