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- proceedings of spie15
- catalysis letters3
- applied catalysis2
- advances in resist technology and processing xvii1
- lithography asia 20081
- metrology, inspection, and process control for microlithography xiv1
- metrology, inspection, and process control for microlithography xvi1
- metrology, inspection, and process control for microlithography xxxi1
- optical microlithography xi1