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- journal of microelectromechanical systems26
- journal of micromechanics and microengineering17
- technical digest. mems 2002 ieee international conference. fifteenth ieee international conference on micro electro mechanical systems (cat. no.02ch37266)12
- applied physics letters11
- journal of micromechanics & microengineering9
- acs nano7
- advanced functional materials6
- sid symposium digest of technical papers6
- spie proceedings6