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- sid symposium digest of technical papers10
- journal of vacuum science & technology b: microelectronics and nanometer structures8
- journal of the society for information display3
- journal of the japan society of powder and powder metallurgy2
- mrs proceedings2
- acs applied materialsinterfaces1
- ecs meeting abstracts1
- ecs transactions1
- electron-beam, x-ray, and ion-beam submicrometer lithographies for manufacturing iii1