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- proceedings of spie6
- 2009 ieee international electron devices meeting (iedm)2
- metrology, inspection, and process control for microlithography xxvii2
- physica status solidi (c)2
- solid-state electronics2
- 2010 proceedings of the european solid state device research conference1
- 2010 proceedings of the european solid-state device research conference (essderc)1
- 30th european mask and lithography conference1
- 31st european mask and lithography conference1