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- materials science forum26
- journal of applied physics6
- journal of electronic materials6
- journal of vacuum science & technology: part b-nanotechnology & microelectronics6
- ecs journal of solid state science & technology5
- mrs online proceedings library5
- journal of vacuum science & technology: part a-vacuums, surfaces & films4
- applied physics express3
- journal of vacuum science & technology: part b-microelectronics & nanometer structures3